Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering
文献类型：会议论文
| 作者 | Zhu, Chaoting; Li, Jia; Yang, Ye; Zhao, Xunna; Zou, Wenwei; Tan, Ruiqin; Song, Weijie |
| 出版日期 | 2017 |
| 会议日期 | OCT 09-13, 2016 |
| 关键词 | OXIDE THIN-FILMS SEMICONDUCTORS MODULES |
| 卷号 | 634 |
| DOI | 10.1016/j.tsf.2017.03.037 |
| 英文摘要 | In this work, we proposed a strategy to improve the damp-heat stability and weak-acid resistance of gallium doped zinc oxide (GZO) thin films by co-doping TiO2 into GZO targets. Results showed that GZO thin films with a 0.2 wt% TiO2 co-doping in the target (GTZO) exhibited a resistivity of 5.1 x 10(-4) Omega.cm and an average transmittance of 82.9%. The relative change in sheet resistance was as low as 5.1% after 24 h damp heat treatment in conditions of 97% relative humidity at 121 degrees C. A craterlike textured surface with a high haze value was not found in GTZO thin films after dipping in 1 vol% HCl solution for 10 min. These results showed that GTZO thin films have great potential for use as transparent electrode in extreme outdoor conditions. (C) 2017 Published by Elsevier B.V. |
| 学科主题 | Materials Science ; Physics |
| ISSN号 | 0040-6090 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/23416]  |
| 专题 | 会议专题 会议专题_会议论文 |
| 推荐引用方式 GB/T 7714 | Zhu, Chaoting,Li, Jia,Yang, Ye,et al. Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering[C]. 见:. OCT 09-13, 2016. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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