High temperature oxidation behavior and mechanical properties of TiAlN/SiN decorative films on borosilicate glass by magnetron sputtering
文献类型：会议论文
| 作者 | Wang, Rui; Li, Jinlong; Wang, Yongxin; Hu, Jianmin; Wu, Haizhong |
| 出版日期 | 2015 |
| 会议日期 | JUL 15-18, 2014 |
| 关键词 | LAYER |
| 卷号 | 584 |
| DOI | 10.1016/j.tsf.2015.03.013 |
| 英文摘要 | The coated borosilicate glass is an idea substitute of glass-ceramics in the household electrical appliances due to the rich colors and low cost. By controlling deposition parameters, the black TiAlN decorative film can be fabricated on the borosilicate glass in the magnetron sputtering equipment with multiple chambers. The transparent SiN protective layer also was deposited on the TiAlN film to keep the black color invariant at the high temperature. The TiAlN/SiN films include the inner TiAlN layer with a thickness of 260 nm and the outer amorphous SiN layer with a thickness of 125 nm. The coated borosilicate glass with the TiAlN/SiN films still retains the black color after oxidation at 600 degrees C in the atmosphere. While the oxidation temperature elevates to 700 degrees C, the color of the TiAlN/SiN films begins to change. The outer SiN layer plays a role as the barrier against oxygen diffusion into the inner TiAlN layer. The TiAlN/SiN films have a hardness of 15.5 GPa. The oxidation below 600 degrees C makes the film hardness increase, but the hardness decreases after oxidation at 700 degrees C. The TiAlN/SiN films have a good adhesion on the glass substrate. After oxidation, the adhesion and toughness of the films decrease significantly. (C) 2015 Elsevier B.V. All rights reserved. |
| 学科主题 | Materials Science ; Physics |
| ISSN号 | 0040-6090 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/23532]  |
| 专题 | 会议专题 会议专题_会议论文 |
| 推荐引用方式 GB/T 7714 | Wang, Rui,Li, Jinlong,Wang, Yongxin,et al. High temperature oxidation behavior and mechanical properties of TiAlN/SiN decorative films on borosilicate glass by magnetron sputtering[C]. 见:. JUL 15-18, 2014. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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