中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Structural properties and surface wettability of Cu-containing diamond-like carbon films prepared by a hybrid linear ion beam deposition technique

文献类型:会议论文

作者Guo, Peng; Sun, Lili; Li, Xiaowei; Xu, Sheng; Ke, Peiling; Wang, Aiying
出版日期2015
会议日期JUL 15-18, 2014
关键词NANO-MECHANICAL PROPERTIES AMORPHOUS-CARBON THIN-FILMS COPPER DLC HYDROPHOBICITY COMPOSITE ROUGHNESS PLASMA
卷号584
DOI10.1016/j.tsf.2015.01.018
英文摘要Cu-containing diamond-like carbon (Cu-DLC) films were deposited on Si/glass substrate by a hybrid ion beam deposition system. The Cu concentration (0.1-39.7 at.%) in the film was controlled by varying the sputtering current. The microstructure and composition of Cu-DLC films were investigated systematically. The surface topography, roughness and surface wettability of the films were also studied. Results indicated that with increasing the Cu concentration, the water contact angle of the films changed from 66.8 degrees for pure carbon film to more than 104.4 degrees for Cu-DLC films with Cu concentration larger than 24.4 at.%. In the hydrophilic region, the polar surface energy decreased from 30.54 mJ/m(2) for pure carbon film to 2.48 mJ/m(2) for the film with Cu 7.0 at.%. (C) 2015 Elsevier B.V. All rights reserved.
学科主题Materials Science ; Physics
ISSN号0040-6090
源URL[http://ir.nimte.ac.cn/handle/174433/23534]  
专题会议专题
会议专题_会议论文
推荐引用方式
GB/T 7714
Guo, Peng,Sun, Lili,Li, Xiaowei,et al. Structural properties and surface wettability of Cu-containing diamond-like carbon films prepared by a hybrid linear ion beam deposition technique[C]. 见:. JUL 15-18, 2014.

入库方式: OAI收割

来源:宁波材料技术与工程研究所

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