Aluminum-Doped Zinc Oxide as Transparent Electrode Materials
文献类型：会议论文
| 作者 | Zhang, Yulong; Zhang, Xianpeng; Tan, Ruiqin; Yang, Ye; Zhao, Junhua; Wang, Weiyan; Cui, Ping; Song, Weijie |
| 出版日期 | 2011 |
| 会议日期 | SEP 25-28, 2010 |
| 关键词 | SOLAR-CELL APPLICATIONS SOLUBILITY LIMIT GRAIN-GROWTH ZNOAL FILMS AL DENSIFICATION TEMPERATURE |
| 卷号 | 685 |
| DOI | 10.4028/www.scientific.net/MSF.685.6 |
| 英文摘要 | Pristine and Al-doped zinc oxide nanopowders were synthesized via a surfactant-assisted complex sol-gel method, possessing a pure ZnO phase structure and controllable grain size which was characterized by X-ray diffraction and scanning electron microscopy. Using these nanopowders, the pristine and Al-doped ZnO magnetron sputtering targets were prepared following a mold-press, cold isostatical-press and schedule sintering temperature procedure. The relative density of these as-prepared targets was tested by Archimedes' method on densitometer. All of the results were above 95 theory density percents, and the resistivity was tested on four-probe system at a magnitude of 10(-2) Omega cm. Related pristine ZnO thin films and Al-doped ZnO thin films were fabricated by magnetron sputtering method, respectively. The pristine and Al-doped ZnO films deposited on the quartz glass by dc sputtering owned a (002) orientation with a thickness of 350 nm at a deposition power of 100 W for two hours under an argon plasma. A good optical transparency above 80% and low resistivity of 1.60x 10(-3) Omega cm were obtained with a deposition temperature of 573 K. The optical energy bandgap could be tailored by Al doping at 4 at.% Al. |
| 会议录出版者 | Materials Science Forum |
| 学科主题 | Materials Science |
| ISSN号 | 0255-5476 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/23655]  |
| 专题 | 会议专题 会议专题_会议论文 |
| 推荐引用方式 GB/T 7714 | Zhang, Yulong,Zhang, Xianpeng,Tan, Ruiqin,et al. Aluminum-Doped Zinc Oxide as Transparent Electrode Materials[C]. 见:. SEP 25-28, 2010. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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