中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network

文献类型:期刊论文

作者Zhang ZL(张灼亮)1,3; Zhou C(周超)1; Du ZM(杜章铭)1,3; Deng L(邓露)2; Cao ZQ(曹志强)1; Wang S(王硕)1; Cheng L(程龙)1; Deng S(邓赛)1
刊名International Journal of Robotics and Automation
出版日期2021
卷号36页码:1-9
关键词multi-rate fusion state block convolution filtering nanoscale measurement
英文摘要

Nano-displacement measurement is one of the most important aspects of nanomanipulation. However, the narrow working space and the heat sensitivity of the microscope limit the installation of many displacement sensors. The self-sensing and time-digit-conversion (TDC) method can overcome the above limitations, making these two methods ideal for nano-displacement measurement. The former method has a high sampling frequency, but its accuracy is low. In contrast, the TDC method is more accurate, but its sampling rate is low. To solve these problems, a fusion measurement method was proposed, thus allowing us to combine the results of the self-sensing and TDC. Specifically, an improved Kalman filter was used to overcome the asynchronous multi-rate problem. Moreover, we fully utilized the information of the calibration instrument using the neural network. As for the overfitting problem, we adopted a neural network with convolution filtering. Our method achieved a precision of 47.9% higher than the traditional method, as well as a linearity (R2) of 0.99990 throughout 3,500 nm range.

语种英语
源URL[http://ir.ia.ac.cn/handle/173211/52125]  
专题复杂系统管理与控制国家重点实验室_水下机器人
通讯作者Zhou C(周超)
作者单位1.State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
2.School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China
3.School of Artificial Intelligence, University of Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
Zhang ZL,Zhou C,Du ZM,et al. A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network[J]. International Journal of Robotics and Automation,2021,36:1-9.
APA Zhang ZL.,Zhou C.,Du ZM.,Deng L.,Cao ZQ.,...&Deng S.(2021).A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network.International Journal of Robotics and Automation,36,1-9.
MLA Zhang ZL,et al."A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network".International Journal of Robotics and Automation 36(2021):1-9.

入库方式: OAI收割

来源:自动化研究所

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