A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network
文献类型:期刊论文
作者 | Zhang ZL(张灼亮)1,3![]() ![]() ![]() ![]() ![]() ![]() |
刊名 | International Journal of Robotics and Automation
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出版日期 | 2021 |
卷号 | 36页码:1-9 |
关键词 | multi-rate fusion state block convolution filtering nanoscale measurement |
英文摘要 | Nano-displacement measurement is one of the most important aspects of nanomanipulation. However, the narrow working space and the heat sensitivity of the microscope limit the installation of many displacement sensors. The self-sensing and time-digit-conversion (TDC) method can overcome the above limitations, making these two methods ideal for nano-displacement measurement. The former method has a high sampling frequency, but its accuracy is low. In contrast, the TDC method is more accurate, but its sampling rate is low. To solve these problems, a fusion measurement method was proposed, thus allowing us to combine the results of the self-sensing and TDC. Specifically, an improved Kalman filter was used to overcome the asynchronous multi-rate problem. Moreover, we fully utilized the information of the calibration instrument using the neural network. As for the overfitting problem, we adopted a neural network with convolution filtering. Our method achieved a precision of 47.9% higher than the traditional method, as well as a linearity (R2) of 0.99990 throughout 3,500 nm range. |
语种 | 英语 |
源URL | [http://ir.ia.ac.cn/handle/173211/52125] ![]() |
专题 | 复杂系统管理与控制国家重点实验室_水下机器人 |
通讯作者 | Zhou C(周超) |
作者单位 | 1.State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China 2.School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China 3.School of Artificial Intelligence, University of Chinese Academy of Sciences, Beijing, China |
推荐引用方式 GB/T 7714 | Zhang ZL,Zhou C,Du ZM,et al. A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network[J]. International Journal of Robotics and Automation,2021,36:1-9. |
APA | Zhang ZL.,Zhou C.,Du ZM.,Deng L.,Cao ZQ.,...&Deng S.(2021).A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network.International Journal of Robotics and Automation,36,1-9. |
MLA | Zhang ZL,et al."A Fusion Measurement Method for Nano-displacement Based on Kalman Filter and Neural Network".International Journal of Robotics and Automation 36(2021):1-9. |
入库方式: OAI收割
来源:自动化研究所
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