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Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements

文献类型：期刊论文

作者Shi, Yali1; Zhang, Mei2; Li, Mingwei1
刊名PHOTONICS
出版日期2024-07-01
卷号11期号:7页码:13
关键词computer vision defect detection spherical optical element
DOI10.3390/photonics11070681
通讯作者Zhang, Mei(ormosia_2021@163.com)
英文摘要In order to realize automatic surface defect detection for large aperture precision spherical optical elements, an automatic surface defect detection instrument has been designed. The instrument consists of a microscopic imaging system, illumination system, motion scanning system, and a software algorithm system. Firstly, a multi-angle channel illumination source and a coaxial illumination source were designed. Bright and dark field images of surface defects were captured by cooperating with an automatic zoom microscope. Then, algorithms for scanning trajectory planning, image stitching, and intelligent defect recognition were designed to achieve full-aperture surface image acquisition and defect quantification detection. The automated defect detection process of the instrument is summarized and introduced. Finally, the experimental platform was constructed, which can work well for the optical elements with a maximum diameter of 400 mm and a relative aperture R/D value of 1. It takes about 15 min to detect an optical element with a diameter of 200 mm in dark-field imaging mode. As a result, the minimum line width of scratch detectable is 2 mu m and the minimum diameter of pitting detectable is 4 mu m. Clearly, the instrument can realize the automatic detection of surface defects of spherical optical elements, and has the advantages of a high efficiency, stability, reliability, quantification, and data traceability.
WOS关键词INSPECTION ; SYSTEM ; FLAWS
WOS研究方向Optics
语种英语
WOS记录号WOS:001277176700001
出版者MDPI
源URL[http://ir.ia.ac.cn/handle/173211/59394]  
专题精密感知与控制研究中心_精密感知与控制
通讯作者Zhang, Mei
作者单位1.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China
2.Acad Mil Sci, Inst Syst Engn, Chinese Peoples Liberat Army, Beijing 100141, Peoples R China
推荐引用方式
GB/T 7714		 Shi, Yali,Zhang, Mei,Li, Mingwei. Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements[J]. PHOTONICS,2024,11(7):13.
APA Shi, Yali,Zhang, Mei,&Li, Mingwei.(2024).Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements.PHOTONICS,11(7),13.
MLA Shi, Yali,et al."Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements".PHOTONICS 11.7(2024):13.

入库方式： OAI收割

来源：自动化研究所

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