Research and development of a novel DeviceNet-Oriented interface system for IC equipment
文献类型：会议论文
| 作者 | Jin N(金妮) ; Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴)
|
| 出版日期 | 2013 |
| 会议名称 | 4th International Conference on Manufacturing Science and Technology, ICMST 2013 |
| 会议日期 | August 3-4, 2013 |
| 会议地点 | Dubai, United arab emirates |
| 关键词 | Computer debugging Hardware Manufacture Program debugging |
| 页码 | 928-932 |
| 中文摘要 | At present, the interface system in IC equipment control software system has to be changed even when a small hardware change occurs, which increases the time and cost of system debugging. This is one of the technical problems needed to be solved in course of development of IC equipment control system software.Therefore, the characteristics of the semiconductor device in IC equipment which used the DeviceNet has been analyzed in this paper. Then one DeviceNet-Oriented interface system, which is capable of shielding the difference of the details of the hardware, has been designed and developed. © (2013) Trans Tech Publications, Switzerland. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议主办者 | University of Tabriz, Iran; Cambridge Institute of Technology, India |
| 会议录 | Advanced Materials Research
 |
| 会议录出版者 | Trans Tech Publications Ltd, |
| 会议录出版地 | Zurich-Durnten, Switzerland |
| 语种 | 英语 |
| ISSN号 | 1022-6680 |
| ISBN号 | 978-3-03785-867-7 |
| 源URL | [http://ir.sia.cn/handle/173321/13881]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Jin N,Xu AD,Liu MZ,et al. Research and development of a novel DeviceNet-Oriented interface system for IC equipment[C]. 见:4th International Conference on Manufacturing Science and Technology, ICMST 2013. Dubai, United arab emirates. August 3-4, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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