Research of Material Transfer Software Platform in IC Equipment Controlling System
文献类型：会议论文
| 作者 | Wang YN(王亚楠); Liu MZ(刘明哲) ; Liu YF(刘元峰)
|
| 出版日期 | 2013 |
| 会议名称 | 2013 4th IEEE International Conference on Software Engineering and Service Science (ICSESS) |
| 会议日期 | May 23-25, 2013 |
| 会议地点 | Beijing, China |
| 关键词 | semiconductor equipment control system material transfer versatility rapid development |
| 页码 | 239-242 |
| 通讯作者 | 王亚楠 |
| 中文摘要 | This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve user's development efficiency, and has good application prospects. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | 2013 4th IEEE International Conference on Software Engineering and Service Science (ICSESS)
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISSN号 | 2327-0586 |
| ISBN号 | 978-1-4673-5000-6 |
| WOS记录号 | WOS:000346301300054 |
| 源URL | [http://ir.sia.cn/handle/173321/13882]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Wang YN,Liu MZ,Liu YF. Research of Material Transfer Software Platform in IC Equipment Controlling System[C]. 见:2013 4th IEEE International Conference on Software Engineering and Service Science (ICSESS). Beijing, China. May 23-25, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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