Research on the material transportation automation technology based on SEMI standard
文献类型：会议论文
| 作者 | Wang CX(王晨曦) ; Liu MZ(刘明哲); Xu AD(徐皑冬)
|
| 出版日期 | 2013 |
| 会议名称 | 2013 3rd International Conference on Machinery Electronics and Control Engineering(ICMECE 2013) |
| 会议日期 | November 27-29, 2013 |
| 会议地点 | Jinan, China |
| 关键词 | SEMI Standard semiconductor material transportation FA |
| 页码 | 883-886 |
| 中文摘要 | Using SEMI standards to provide the communication interface and communication information between the semiconductor device and the factory host, in order to improve the yield and quality of semiconductor products has been a general consensus. In this paper, through the analysis of the related standard about the material transport in SEMI, and the specific introduction of the actual device model of the semiconductor equipment, describes the process of material transportation factory automation technology and the application in the actual equipment. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | Applied Mechanics and Materials
 |
| 会议录出版者 | Trans Tech Publications Ltd, |
| 会议录出版地 | Zurich-Durnten, Switzerland |
| 语种 | 英语 |
| ISSN号 | 1660-9336 |
| ISBN号 | 978-3-03785-903-2 |
| WOS记录号 | WOS:000337004600196 |
| 源URL | [http://ir.sia.cn/handle/173321/13883]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Wang CX,Liu MZ,Xu AD. Research on the material transportation automation technology based on SEMI standard[C]. 见:2013 3rd International Conference on Machinery Electronics and Control Engineering(ICMECE 2013). Jinan, China. November 27-29, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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