Overview of micro-force sensing methods
文献类型：会议论文
| 作者 | Ma CZ(马超哲) ; Du JS(杜劲松); Liu YY(刘意杨); Chu YK(褚云凯)
|
| 出版日期 | 2013 |
| 会议名称 | 2013 International Conference on Mechatronics and Information Technology, ICMIT 2013 |
| 会议日期 | October 19-20, 2013 |
| 会议地点 | Guilin, China |
| 关键词 | Information technology Micromachining Processing |
| 页码 | 25-31 |
| 中文摘要 | At present, reliable micro-force sensing is one of the most important research for micromanipulation and micro-assembly. Six kinds of methods to detect micro-force are described in this paper. Analysis of the basic principle and detection accuracy of each sensing method, and applications in micro-assembly and micromanipulation are briefly introduced. The purpose of this paper is to be useful to provide some references for scholars engaging in the micro-force sensing, which in turn promotes automatic processing level of micro-assembly and micromanipulation to reliably manufacture micro devices of high quality. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议主办者 | Korea Maritime University; Inha University; Hong Kong Industrial Technology Research Centre |
| 会议录 | Applied Mechanics and Materials
 |
| 会议录出版者 | Trans Tech Publications |
| 会议录出版地 | Zurich-Durnten, Switzerland |
| 语种 | 英语 |
| ISSN号 | 1660-9336 |
| ISBN号 | 978-3-03785-941-4 |
| WOS记录号 | WOS:000336871700006 |
| 源URL | [http://ir.sia.cn/handle/173321/14564]  |
| 专题 | 沈阳自动化研究所_智能检测与装备研究室 |
| 推荐引用方式 GB/T 7714 | Ma CZ,Du JS,Liu YY,et al. Overview of micro-force sensing methods[C]. 见:2013 International Conference on Mechatronics and Information Technology, ICMIT 2013. Guilin, China. October 19-20, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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