Implementation of a customizable GUI software platform for IC equipment
文献类型：会议论文
| 作者 | Wang CX(王晨曦) ; Liu MZ(刘明哲); Xu AD(徐皑冬)
|
| 出版日期 | 2014 |
| 会议名称 | 2014 International Conference on Measurement, Instrumentation and Automation |
| 会议日期 | April 23-24, 2014 |
| 会议地点 | Shanghai, China |
| 关键词 | Semiconductor device manufacture Silicon wafers |
| 页码 | 1455-1458 |
| 中文摘要 | With the development of semiconductor industry, different types of wafer processing are increasing. According to the different wafer processing models, the need of data display and process is different. In this paper, a customizable software platform is described for the manufacturing equipment of semiconductor integrated circuit (IC equipment). The C# control technology has been used to build the IC equipment customizable control system interface. The development method of customizable control technology based on C# can realize the control of the reuse and codes sharing, in order to improve programming efficiency, avoid the development of two times, cost saving and be easy to debug. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议录 | Applied Mechanics and Materials
 |
| 会议录出版者 | Trans Tech Publications Ltd |
| 会议录出版地 | Zurich-Durnten, Switzerland |
| 语种 | 英语 |
| ISSN号 | 1660-9336 |
| ISBN号 | 978-3-03835-138-2 |
| 源URL | [http://ir.sia.cn/handle/173321/15038]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Wang CX,Liu MZ,Xu AD. Implementation of a customizable GUI software platform for IC equipment[C]. 见:2014 International Conference on Measurement, Instrumentation and Automation. Shanghai, China. April 23-24, 2014. |
入库方式： OAI收割
来源：沈阳自动化研究所
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