Research on PVDF micro-force sensor
文献类型：会议论文
| 作者 | Ma CZ(马超哲) ; Du JS(杜劲松); Liu YY(刘意杨)
|
| 出版日期 | 2014 |
| 会议名称 | 4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014 |
| 会议日期 | June 19-20, 2014 |
| 会议地点 | Guilin, China |
| 关键词 | Manufacture Micromachining Piezoelectricity Signal processing |
| 页码 | 1135-1138 |
| 中文摘要 | At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor's output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution. © (2014) Trans Tech Publications, Switzerland. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议主办者 | Academy Publisher; CEIS; et al; INDERSCIENCE Publishers; TMS; Trans Tech publications inc. |
| 会议录 | Applied Mechanics and Materials
 |
| 会议录出版者 | Trans Tech Publications Ltd |
| 会议录出版地 | Zurich-Durnten, Switzerland |
| 语种 | 英语 |
| ISSN号 | 1660-9336 |
| ISBN号 | 978-3-03835-192-4 |
| 源URL | [http://ir.sia.cn/handle/173321/15136]  |
| 专题 | 沈阳自动化研究所_智能检测与装备研究室 |
| 推荐引用方式 GB/T 7714 | Ma CZ,Du JS,Liu YY. Research on PVDF micro-force sensor[C]. 见:4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014. Guilin, China. June 19-20, 2014. |
入库方式： OAI收割
来源：沈阳自动化研究所
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