Research and development of a multiple data source curve drawing software for IC equipment
文献类型：会议论文
| 作者 | Jin N(金妮) ; Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴); Wang CX(王晨曦)
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| 出版日期 | 2014 |
| 会议名称 | 2014 International Conference on Manufacturing and Engineering Technology (ICMET) |
| 会议日期 | October 17-19, 2014 |
| 会议地点 | Sanya, China |
| 关键词 | IC equipment control system C# language |
| 页码 | 209-212 |
| 中文摘要 | It is essential that IC equipment control software can get more intuitive information from the production data during wafer manufacturing. Currently, data are provided to users in a report form in most IC control systems that are not intuitive and cannot reflect the data trend of a long-term change. However, only a few IC equipment control systems can provide curve display function, which is still incomplete and inflexibility, and it is difficult to implement flexible configuration according to the user requirements. Therefore, C# control technology and XML approaches were studied, a flexible and multiple data source curve drawing software for IC equipment are introduced in this paper. This software supports multiple data source data source data acquisition and conversion, it can set curve parameters dynamically. In addition, it is easy to share the resource, operate, maintain and upgrade the software. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | Manufacturing and Engineering Technology
 |
| 会议录出版者 | Taylor & Francis Group |
| 会议录出版地 | London |
| 语种 | 英语 |
| ISBN号 | 978-1-138-02645-2 |
| WOS记录号 | WOS:000380507800043 |
| 源URL | [http://ir.sia.cn/handle/173321/15360]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Jin N,Xu AD,Liu MZ,et al. Research and development of a multiple data source curve drawing software for IC equipment[C]. 见:2014 International Conference on Manufacturing and Engineering Technology (ICMET). Sanya, China. October 17-19, 2014. |
入库方式： OAI收割
来源：沈阳自动化研究所
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