Scheduling Single-Blade Cluster Tools with Time Window Constraints
文献类型：会议论文
| 作者 | Li LY(李林瑛); Hu JT(胡静涛)
|
| 出版日期 | 2008 |
| 会议名称 | 20th Chinese Control and Decision Conference |
| 会议日期 | July 2-4, 2008 |
| 会议地点 | Yantai, China |
| 关键词 | Cluster Tools Scheduling Time Window Constraints |
| 页码 | 1069-1072 |
| 通讯作者 | 李林瑛 |
| 中文摘要 | In semiconductor manufacturing, finding an efficient way for scheduling a cluster tools is crucial for productivity improvement and cost reduction. hi this paper, we investigate the cycle scheduling problem with time window constrains in cluster tools. The objective is to minimize the cycle time. To solve the problem, we present a searching algorithm which based on linear programming model and the collision detection strategy. The algorithm uses the fundamental period as controlling parameters to generate all the possible permutations of robot action sequence in the cycle. A linear programming model is then used to find the optimal schedule for each of these permutations based on our constraints. To avoid the collision of robot action, we solve it with slide and stretch strategy. The experiments of Spin Coater demonstrate the effectiveness and efficiency of the proposed algorithm. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | 2008 CHINESE CONTROL AND DECISION CONFERENCE, VOLS 1-11
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-1733-9 |
| WOS记录号 | WOS:000260562700216 |
| 源URL | [http://ir.sia.cn/handle/173321/8126]  |
| 专题 | 沈阳自动化研究所_工业信息学研究室_工业控制系统研究室 |
| 推荐引用方式 GB/T 7714 | Li LY,Hu JT. Scheduling Single-Blade Cluster Tools with Time Window Constraints[C]. 见:20th Chinese Control and Decision Conference. Yantai, China. July 2-4, 2008. |
入库方式： OAI收割
来源：沈阳自动化研究所
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