中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Scheduling Single-Blade Cluster Tools with Time Window Constraints

文献类型:会议论文

作者Li LY(李林瑛); Hu JT(胡静涛)
出版日期2008
会议名称20th Chinese Control and Decision Conference
会议日期July 2-4, 2008
会议地点Yantai, China
关键词Cluster Tools Scheduling Time Window Constraints
页码1069-1072
通讯作者李林瑛
中文摘要In semiconductor manufacturing, finding an efficient way for scheduling a cluster tools is crucial for productivity improvement and cost reduction. hi this paper, we investigate the cycle scheduling problem with time window constrains in cluster tools. The objective is to minimize the cycle time. To solve the problem, we present a searching algorithm which based on linear programming model and the collision detection strategy. The algorithm uses the fundamental period as controlling parameters to generate all the possible permutations of robot action sequence in the cycle. A linear programming model is then used to find the optimal schedule for each of these permutations based on our constraints. To avoid the collision of robot action, we solve it with slide and stretch strategy. The experiments of Spin Coater demonstrate the effectiveness and efficiency of the proposed algorithm.
收录类别EI ; CPCI(ISTP)
产权排序1
会议录2008 CHINESE CONTROL AND DECISION CONFERENCE, VOLS 1-11
会议录出版者IEEE
会议录出版地NEW YORK
语种英语
ISBN号978-1-4244-1733-9
WOS记录号WOS:000260562700216
源URL[http://ir.sia.cn/handle/173321/8126]  
专题沈阳自动化研究所_工业信息学研究室_工业控制系统研究室
推荐引用方式
GB/T 7714
Li LY,Hu JT. Scheduling Single-Blade Cluster Tools with Time Window Constraints[C]. 见:20th Chinese Control and Decision Conference. Yantai, China. July 2-4, 2008.

入库方式: OAI收割

来源:沈阳自动化研究所

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