Manufacturing Schedule of Dual-armed Cluster Tools Based on Heuristic Search
文献类型：会议论文
| 作者 | Geng YF(耿沿锋); Kang K(康凯); Liu J(刘霁); Wang H(王宏) |
| 出版日期 | 2008 |
| 会议名称 | IEEE International Conference on Industrial Technology |
| 会议日期 | April 21-24, 2008 |
| 会议地点 | Chengdu, China |
| 页码 | 1937-1942 |
| 中文摘要 | Cluster tools are fundamental equipments in over-8-inch wafer manufacturing. Due to the tools' unique physical structure and particular semiconductor manufacturing demands, the scheduling of cluster tools is more complex than normal Job-Shop problems. This paper proposes a scheduling algorithm for dual-armed cluster tools based on Heuristic Search. We mainly examine the scheduling technique under the most complex situation including residency constraints and multi-visit requirements. A periodic idea that every wafer enters into cluster tools in the same interval is proved still feasible under this situation. To find a conflict-free schedule under a fundamental period (FP) in short time, we define an evaluation function to select the most proper operation sequence from all the possibilities, and some feedback information from a conflict is used to prevent over pruning. Experiments under the most complex situations demonstrate the feasibility and effectiveness of this algorithm. Other experiments with looser constraints show its expansibility and adaptability. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议主办者 | IEEE |
| 会议录 | 2008 IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL TECHNOLOGY, VOLS 1-5
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-1705-6 |
| WOS记录号 | WOS:000262125901123 |
| 源URL | [http://ir.sia.cn/handle/173321/8102]  |
| 专题 | 沈阳自动化研究所_工业信息学研究室_工业控制系统研究室 |
| 推荐引用方式 GB/T 7714 | Geng YF,Kang K,Liu J,et al. Manufacturing Schedule of Dual-armed Cluster Tools Based on Heuristic Search[C]. 见:IEEE International Conference on Industrial Technology. Chengdu, China. April 21-24, 2008. |
入库方式： OAI收割
来源：沈阳自动化研究所
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