Absolute surface metrology by rotational averaging in oblique incidence interferometry
文献类型：期刊论文
| 作者 | Lin, WH ; He, YM ; Song, L ; Luo, HX ; Wang, J |
| 刊名 | APPLIED OPTICS
 |
| 出版日期 | 2014 |
| 卷号 | 53期号:16页码:3370—3378 |
| 关键词 | LARGE FLAT MIRRORS 3-FLAT TEST OPTICS RECONSTRUCTION SYSTEM |
| ISSN号 | 1559-128X |
| 通讯作者 | wangjie@sinap.ac.cn |
| 英文摘要 | A modified method for measuring the absolute figure of a large optical flat surface in synchrotron radiation by a small aperture interferometer is presented. The method consists of two procedures: the first step is oblique incidence measurement; the second is multiple rotating measurements. This simple method is described in terms of functions that are symmetric or antisymmetric with respect to reflections at the vertical axis. Absolute deviations of a large flat surface could be obtained when mirror antisymmetric errors are removed by N-position rotational averaging. Formulas are derived for measuring the absolute surface errors of a rectangle flat, and experiments on high-accuracy rectangle flats are performed to verify the method. Finally, uncertainty analysis is carried out in detail. (C) 2014 Optical Society of America |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000337502100006 |
| 公开日期 | 2015-03-13 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/14001]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Lin, WH,He, YM,Song, L,et al. Absolute surface metrology by rotational averaging in oblique incidence interferometry[J]. APPLIED OPTICS,2014,53(16):3370—3378. |
| APA | Lin, WH,He, YM,Song, L,Luo, HX,&Wang, J.(2014).Absolute surface metrology by rotational averaging in oblique incidence interferometry.APPLIED OPTICS,53(16),3370—3378. |
| MLA | Lin, WH,et al."Absolute surface metrology by rotational averaging in oblique incidence interferometry".APPLIED OPTICS 53.16(2014):3370—3378. |
入库方式： OAI收割
来源：上海应用物理研究所
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