Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy
文献类型：期刊论文
| 作者 | Shi JL(施佳林) ; Liu LQ(刘连庆); Zhou PL(周培林); Wang FF(王飞飞); Wang YC(王越超)
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| 刊名 | IEEE TRANSACTIONS ON NANOTECHNOLOGY
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| 出版日期 | 2015 |
| 卷号 | 14期号:4页码:735-741 |
| 关键词 | Atomic force microscopy (AFM) dynamic cantilever model subnanomachining ultrasonic-assisted machining |
| ISSN号 | 1536-125X |
| 产权排序 | 1 |
| 通讯作者 | 施佳林 |
| 中文摘要 | The ultrasonic vibration (UV)-assisted method, as an innovative nanomachining process, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the mechanism of nanomachining by ultrasonic-assisted AFM is still unclear. Furthermore, the mathematical control model for the nanomachining process is still lacking. Therefore, the UV-assisted nanomachining process is difficult to control on the nanometer-thick film, and no additional work has been reported at this time. In this paper, the mechanisms of ultrasonic-assisted AFM subnanomachining have been analyzed by using a point-mass model for the dynamic AFM cantilever, and a mathematical model of ultrasonic subnanomachining has been established on the basis of these mechanisms. The subnanomachining experiments were carried out on a 5-nm-thick polystyrene thin film using AFM under sample UV conditions. The experimental results have shown that the amplitude of sample UV can regulate the subnanomachining depth. Finally, the simulation results from the mathematical model and the experimental results have been compared in this study. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | THIN-FILMS ; NANOFABRICATION ; SURFACE ; NANOSCALE ; SCALE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; CANTILEVERS ; CHALLENGES ; TIP |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000357821500022 |
| 源URL | [http://ir.sia.cn/handle/173321/16854]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Shi JL,Liu LQ,Zhou PL,et al. Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2015,14(4):735-741. |
| APA | Shi JL,Liu LQ,Zhou PL,Wang FF,&Wang YC.(2015).Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy.IEEE TRANSACTIONS ON NANOTECHNOLOGY,14(4),735-741. |
| MLA | Shi JL,et al."Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy".IEEE TRANSACTIONS ON NANOTECHNOLOGY 14.4(2015):735-741. |
入库方式： OAI收割
来源：沈阳自动化研究所
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