中国科学院机构知识库网格
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Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE) 会议论文  OAI收割
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.; Yong-gang W.; Shu-yan C.; Bo C.
收藏  |  浏览/下载:16/0  |  提交时间:2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed  which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above  the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand  both the two samples are measured by WYKO surface profiler  and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler  which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO  and the possible reasons of such difference have been discussed in detail. 2009 SPIE.  
Large aperture low threshold current 980nmVCSELs fabricated with pulsed anodic oxidation (EI CONFERENCE) 会议论文  OAI收割
Optoelectronic Materials and Devices II, November 2, 2007 - November 5, 2007, Wuhan, China
Jinjiang C.; Yongqiang N.; Te L.; Guangyu L.; Yan Z.; Biao P.; Yanfang S.; Lijun W.
收藏  |  浏览/下载:19/0  |  提交时间:2013/03/25
Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy (EI CONFERENCE) 会议论文  OAI收割
13th International Conference on Molecular Beam Epitaxy, August 22, 2004 - August 27, 2004, 13th International Conference on Molecular Beam Epitaxy, August 22, 2004 - August 27, 2004
Liang H. W.; Lu Y. M.; Shen D. Z.; Yan J. F.; Li B. H.; Zhang J. Y.; Liu Y. C.; Fan X. W.
收藏  |  浏览/下载:26/0  |  提交时间:2013/03/25
High-quality ZnO thin films on c-plane sapphire (Al2O 3) substrates were prepared by plasma-molecular beam epitaxy (P-MBE). The influence of growth temperature on growth mode of ZnO was investigated. Real-time monitored by reflection high-energy electron diffraction (RHEED) images show that  below 500 C  ZnO thin film was grown by three-dimension (3D) growth mode. While the two-dimension (2D) growth mode was obtained above growth temperature of 650 C. Atomic force microscopy (AFM) images present that the surface morphology of ZnO thin film with 2D growth is improved and X-ray rocking curves (XRC) indicate that the full width at half maximum (FWHM) of the ZnO (0 0 2) peak becomes narrow. From the photoluminescence (PL) spectra  ultraviolet (UV) emission peak exhibits obvious blue-shift for the samples grown at lower temperature  which is attributed to the effect of the quantum confinement arisen from small crystal grain sizes. The minimum carrier concentration of N=7.661016 cm-3 was obtained in the ZnO thin films with the 2D grown  which is closed to that of bulk ZnO. 2005 Elsevier B.V. All rights reserved.  
Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE) 会议论文  OAI收割
Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China
作者:  
Wang G.;  Chen W.
收藏  |  浏览/下载:20/0  |  提交时间:2013/03/25
The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory  the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10 m  length and width of the cantilever beam are 1900 and 1000 m  length and width of the balance beam are 100 and 1000 m  shortest spacing between the upper and lower electrodes is 0.05 m  and highness of the lower electrode is 55 m  respectively. The actuating voltage is less than 10 V  and the switching time of Ton and Toff are 1.30ms and 1.25ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.