机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2005 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE) 会议论文  OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China Zhou C.; Li H.; Chen C.; Zhou C.; Qian S. 收藏  |  浏览/下载：25/0  |  提交时间：2013/03/25 Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal  spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle  optical system  mechanical constructions  DC serve motor control system  array detector  data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy  low cost  multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.