机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2010 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Influence of spatial temperature distribution on high accuracy interferometric metrology (EI CONFERENCE) 会议论文  OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者:  Yang H.;  Zhang J.;  Zhang J.;  Zhang J.;  Yan F. 收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25 We calculate the influence of temperature change on the refractive index of air  establish a model of air temperature distribution and analyze the effect of different temperature distribution on the high accuracy interferometric metrology. First  a revised Edlen formula is employed to acquire the relation between temperature and refractive index of air  followed by introducing the fixed temperature gradient distribution among the spatial grid within the optical cavity between the reference flat and the test flat of the Fizeau interferometer  accompanied by a temperature change random function within each grid. Finally  all the rays through the air layer with different incident angles are traced by Matlab program in order to obtain the final output position  angle and OPD for each ray. The influence of different temperature distribution and the length of the optical cavity in on the testing accuracy can be analyzed through the RMS value that results from repeatable rays tracing. As a result  the horizontal distribution (vertical to optical axis) has a large effect on the testing accuracy. Thus  to realize the high accuracy figure metrology  the horizontal distribution of temperature must be rigorously controlled as well as to shorten the length of the optical cavity to a large extent. The results from our simulation are of great significant for the accuracy analysis of interferometric testing and the research of manufacturing a interferometer. 2010 Copyright SPIE - The International Society for Optical Engineering.