机构

• 长春光学精密机械与物... [1]
• 光电技术研究所 [1]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [2]

发表日期

• 2012 [2]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Immersed nanospheres super-lithography for the fabrication of sub-70nm nanoholes with period below 700nm (EI CONFERENCE) 会议论文  OAI收割 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom 作者:  Li S.;  Du J.;  Shi L. 收藏  |  浏览/下载：129/0  |  提交时间：2013/03/25 A maskless nano-lithography method by using polystyrene spheres (PSs) self-assembled on silver slab (NSSL) was proposed in [optics express  Vol. 16  No. 19 (2008) 14397]. Following that  to break the limitations in resolution and PSs period of NSSL method  in this paper  we present PSs immersed super-resolution lithography (NSISL) technology by embedding the PSs into appropriate material to improve the efficiency of the surface plasmon excitation. The energy modulating mechanism and the rules of the resolution affected by silver slab were studied by calculating and analysing the energy distribution. The curve of the lithography resolution versus the silver thickness was presented. In order to verify this method  contrast analysis was carried out with NSSL. The results show that the lithography resolution is improved efficiently. Taking a specific configuration with PS diameter of 600nm as an example  the resolution was improved to 54nm from 190nm with Ag thickness of 25nm. Based on the calculation results  we carried out the experiments. Nano holes with dimension of 75nm and period of 600nm were obtained. 2012 IEEE.   Immersed nanospheres super-lithography for the fabrication of sub-70nm nanoholes with period below 700nm 会议论文  OAI收割 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, 2012 作者:  Li, Shuhong;  Shi, Lifang;  Yang, Zheng;  Huang, Xia;  Zhang, Zhiyou 收藏  |  浏览/下载：13/0  |  提交时间：2016/11/24