中国科学院机构知识库网格系统: 检索

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	Sub-5 nm Lithography with Single GeV Heavy Ions Using Inorganic Resist 期刊论文 OAI收割 NANO LETTERS, 2021, 卷号: 21, 期号: 6, 页码: 2390-2396 作者: Liu, Qing; Zhao, Jing; Guo, Jinlong; Wu, Ruqun; Liu, Wenjing \| 收藏 \| 浏览/下载：34/0 \| 提交时间：2021/12/10 Nanolithography Heavy Ions Single-digit Nanometer Atomic-scale Fabrication Inorganic Resist
	Growth of Large-Area Homogeneous Monolayer Transition-Metal Disulfides via a Molten Liquid Intermediate Process 期刊论文 OAI收割 ACS APPLIED MATERIALS & INTERFACES, 2020, 卷号: 12, 期号: 11, 页码: 13174-13181 作者: Liu, Hang; Qi, Guopeng; Tang, Caisheng; Chen, Maolin; Chen, Yang \| 收藏 \| 浏览/下载：62/0 \| 提交时间：2021/02/02 transition-metal dichalcogenides chemical vapor deposition large-area growth molten liquid intermediate monolayer
	Growth of Large-Area Homogeneous Monolayer Transition-Metal Disulfides via a Molten Liquid Intermediate Process 期刊论文 OAI收割 ACS APPLIED MATERIALS & INTERFACES, 2020, 卷号: 12, 期号: 11, 页码: 13174-13181 作者: Liu, Hang; Qi, Guopeng; Tang, Caisheng; Chen, Maolin; Chen, Yang \| 收藏 \| 浏览/下载：64/0 \| 提交时间：2021/02/02 transition-metal dichalcogenides chemical vapor deposition large-area growth molten liquid intermediate monolayer
	Ultrawide bandgap AlN metasurfaces for ultraviolet focusing and routing 期刊论文 OAI收割 OPTICS LETTERS, 2020, 卷号: 45, 期号: 13, 页码: 3466-3469 作者: Zelin Hu; Linyun Long; Rongqiao Wan; Chen Zhang; Lei Zhang; Jianchang Yan; Huigao Duan; Liancheng Wang \| 收藏 \| 浏览/下载：14/0 \| 提交时间：2021/05/25
	Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification 期刊论文 OAI收割 Microelectronic Engineering, 2014 作者: Zhang, Zhiqiang; Duan, Huigao; Tang, Yuguo; Li, Haiwen; Wu, Yihui \| 收藏 \| 浏览/下载：17/0 \| 提交时间：2016/07/28