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中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

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	On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文 OAI收割 Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52 Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei 收藏 \| 浏览/下载：14/0 \| 提交时间：2012/08/23
	On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文 OAI收割 Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52 Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei 收藏 \| 浏览/下载：13/0 \| 提交时间：2012/08/23
	A NOVEL MONOLITHICALLY INTEGRATED PRESSURE, ACCELEROMETER AND TEMPERATURE COMPOSITE SENSOR 会议论文 OAI收割 Transducers’09:The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009 Quan Wang, Xinxin Li, Tie Li, Minhang Bao, Kun Zhang, Xiaohong Ge, Wei Zhou and Haifei Bao 收藏 \| 浏览/下载：21/0 \| 提交时间：2012/05/04