机构

• 上海微系统与信息技术... [3]
• 中国科学院大学 [1]

采集方式

• OAI收割 [3]
• iSwitch采集 [1]

内容类型

• 会议论文 [2]
• 期刊论文 [2]

发表日期

• 2015 [1]
• 2011 [3]

学科主题

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Length-extensional resonating gas sensors with ic-foundry compatible low-cost fabrication in non-soi single-wafer 期刊论文  iSwitch采集 Microelectronic engineering, 2015, 卷号: 136, 页码: 1-7 作者:  Yu, Feng;  Xu, Pengcheng;  Wang, Jiachou;  Li, Xinxin 收藏  |  浏览/下载：77/0  |  提交时间：2019/05/10 Resonant gas sensor  Extensional bulk resonance mode  Non-soi wafer  Low-cost fabrication  Integrated-circuit foundry  Organo-phosphorous pesticide   A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors 期刊论文  OAI收割 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, 期号: 0, 页码: 410-413 Wang, Jiachou; Li, XX 收藏  |  浏览/下载：16/0  |  提交时间：2012/08/23 MONOLITHIC-INTEGRATED SILICON BULK-MICROMACHINED ACCELEROMETER AND PRESSURE-SENSOR FOR TIRE-PRESSURE-MONITORING-SYSTEM (TPMS) APPLICATION 会议论文  OAI收割 Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011 Jiachou Wang and Xinxin Li 收藏  |  浏览/下载：20/0  |  提交时间：2012/05/04 A SINGLE-WAFER-BASED SINGLE-SIDED BULK-MICROMACHINING TECHNIQUE FOR HIGH-YIELD AND LOW-COST VOLUME PRODUCTION OF PRESSURE SENSORS 会议论文  OAI收割 Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011 Jiachou Wang and Xinxin Li 收藏  |  浏览/下载：21/0  |  提交时间：2012/05/04