中国科学院机构知识库网格系统: 检索

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	Fabrication of an ultra-thin low resistance and high stability Ru-Mo-C seedless barrier for advanced Cu dual-damascene interconnects 期刊论文 OAI收割 JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2018 作者: Lin, Liwei; Jiao, Guohua; Lu, Yuanfu; Liu, Bo; Zou, Jianxiong \| 收藏 \| 浏览/下载：156/0 \| 提交时间：2019/01/31
	Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation. 期刊论文 OAI收割 APPLIED SURFACE SCIENCE, 2018 作者: Zou, Jianxiong; Liu, Bo; Lin, Liwei; Lu, Yuanfu; Dong, Yuming \| 收藏 \| 浏览/下载：47/0 \| 提交时间：2019/01/31
	Cooperation of earthworm and arbuscular mycorrhizae enhanced plant N uptake by balancing absorption and supply of ammonia 期刊论文 OAI收割 SOIL BIOLOGY & BIOCHEMISTRY, 2018, 卷号: 116, 期号: x, 页码: 351-359 作者: He, Xinxing; Chen, Yuanqi; Liu, Shengjie; Gunina, Anna; Wang, Xiaoli \| 收藏 \| 浏览/下载：46/0 \| 提交时间：2018/02/09 Biological Invasion Understory Plant n Availability Symbiosis Decomposer
	Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature. 期刊论文 OAI收割 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2017 作者: Zou, Jianxiong ; Dong, Yuming ; Liu, Bo ; Lin, Liwei ; Zhu, Jingjun \| 收藏 \| 浏览/下载：43/0 \| 提交时间：2018/02/02
	The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization 期刊论文 OAI收割 JOURNAL OF APPLIED PHYSICS, 2016 作者: Zou, Jianxiong; Liu, Bo; Jiao, Guohua; Lu, Yuanfu; Dong, Yuming 收藏 \| 浏览/下载：30/0 \| 提交时间：2017/01/13