机构

• 长春光学精密机械与物... [1]
• 宁波材料技术与工程研... [1]
• 上海光学精密机械研究... [1]

采集方式

• OAI收割 [3]

内容类型

• 期刊论文 [2]
• 会议论文 [1]

发表日期

• 2010 [1]
• 2009 [1]
• 2008 [1]

学科主题

• 光学薄膜 [1]

筛选

浏览/检索结果: 共3条，第1-3条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序作者升序作者降序题名升序题名降序发表日期升序发表日期降序 Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach 期刊论文  OAI收割 ACTA PHYSICA SINICA, 2010, 卷号: 59, 期号: 4, 页码: 2356-2363 Zhou Y; Wu GS; Dai W; Li HB; Wang AY 收藏  |  浏览/下载：17/0  |  提交时间：2010/06/09 ANGLE SPECTROSCOPIC ELLIPSOMETRY  MICROSCOPIC SURFACE-ROUGHNESS   Optical properties and microstructure of Ta2O5 biaxial film 期刊论文  OAI收割 appl. optics, 2009, 卷号: 48, 期号: 1, 页码: 127, 133 齐红基; Xiao Xiudi; 贺洪波; Yi Kui; 范正修 收藏  |  浏览/下载：881/221  |  提交时间：2009/09/22 SCULPTURED THIN-FILMS  PRINCIPAL REFRACTIVE-INDEXES  SPECTROSCOPIC ELLIPSOMETRY  CONSTANT DETERMINATION  OBLIQUE DEPOSITION  TANTALUM OXIDE  PRISM COUPLER  MATRIX  ANGLE  PARAMETERS   Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文  OAI收割 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China 作者:  Liu L.;  Yang H.;  Liu L. 收藏  |  浏览/下载：39/0  |  提交时间：2013/03/25 We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First  we obtained the structure information (the layer thickness  surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second  based on the acquired structure information  the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally  the optical band gap is verified by Taue plot method  which is well consistent with that of SE.