中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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Beam optics of upgraded high energy heavy ion microbeam in Lanzhou 期刊论文  OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 461, 页码: 10-15
作者:  
Ponomarov, Artem;  Du, Guanghua;  Guo, Jinlong;  Liu, Wenjing;  Wu, Ruqun
  |  收藏  |  浏览/下载:35/0  |  提交时间:2022/01/19
Heavy-ion radiography facility at the Institute of Modern Physics 期刊论文  OAI收割
LASER AND PARTICLE BEAMS, 2014, 卷号: 32, 页码: 651-655
作者:  
Sheng, LN;  Zhao, YT;  Yang, GJ;  Wei, T;  Jiang, XG
  |  收藏  |  浏览/下载:27/0  |  提交时间:2017/03/28
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  
Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y.
收藏  |  浏览/下载:17/0  |  提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.  
Near-field beam pattern measurement of qualification model of ALMA band 8 (385-500 GHz) cartridge receiver 期刊论文  OAI收割
EXPERIMENTAL ASTRONOMY, 2009, 卷号: 24, 期号: 1-3, 页码: 89-107
作者:  
Naruse, Masato;  Ito, Tetsuya;  Sekimoto, Yutaro;  Toba, Hiroyuki;  Satou, Naohisa
收藏  |  浏览/下载:18/0  |  提交时间:2011/12/08
螺线管传输并聚焦高能质子束的数值模拟研究 学位论文  OAI收割
作者:  
张忠亚
  |  收藏  |  浏览/下载:42/0  |  提交时间:2018/12/26