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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
近代物理研究所 [2]
长春光学精密机械与物... [1]
上海光学精密机械研究... [1]
紫金山天文台 [1]
采集方式
OAI收割 [5]
内容类型
期刊论文 [3]
会议论文 [1]
学位论文 [1]
发表日期
2019 [1]
2014 [1]
2010 [1]
2009 [1]
学科主题
Astronomy ... [1]
光学 [1]
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Beam optics of upgraded high energy heavy ion microbeam in Lanzhou
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 461, 页码: 10-15
作者:
Ponomarov, Artem
;
Du, Guanghua
;
Guo, Jinlong
;
Liu, Wenjing
;
Wu, Ruqun
  |  
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2022/01/19
High energy heavy ion microbeam
Spatial resolution
Beam optics simulation
Cyclotron
Carbon therapy
Single event upset
Heavy-ion radiography facility at the Institute of Modern Physics
期刊论文
OAI收割
LASER AND PARTICLE BEAMS, 2014, 卷号: 32, 页码: 651-655
作者:
Sheng, LN
;
Zhao, YT
;
Yang, GJ
;
Wei, T
;
Jiang, XG
  |  
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2017/03/28
Beam Optics
Heavy-ion Radiography
Magnetic Lens System
Material Identification
Simulation
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE)
会议论文
OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:
Zhao Y.
;
Zhang W.
;
Zhang W.
;
Li S.
;
Gong Y.
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However
the former has the disadvantage of weak intensity distribution controlling ability
and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized
and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE
light beam propagation distance
and the structure of the beam shaping unit
a method of determining the designing parameters is discussed. Using this method
several illumination modes are realized
and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last
and it is proven to be feasible. 2010 SPIE.
Near-field beam pattern measurement of qualification model of ALMA band 8 (385-500 GHz) cartridge receiver
期刊论文
OAI收割
EXPERIMENTAL ASTRONOMY, 2009, 卷号: 24, 期号: 1-3, 页码: 89-107
作者:
Naruse, Masato
;
Ito, Tetsuya
;
Sekimoto, Yutaro
;
Toba, Hiroyuki
;
Satou, Naohisa
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2011/12/08
Near-field beam pattern measurements
SIS receiver
Physical optics simulation
螺线管传输并聚焦高能质子束的数值模拟研究
学位论文
OAI收割
作者:
张忠亚
  |  
收藏
  |  
浏览/下载:42/0
  |  
提交时间:2018/12/26
强场激光物理
high field laser physics
螺线管
solenoid
PIC数值模拟
PIC numerical simulation
质子束
proton beam
离子光学
ion optics
像差
aberration