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	Liquid Crystal Phase Control Method Based on Blazed Grating Model 会议论文 OAI收割作者: Hongyang Guo[1,2,3], Shengping Du[1.2] \| 收藏 \| 浏览/下载：19/0 \| 提交时间：2018/12/20 Blazed grating Liquid crystal Phase modulation Diffraction intensity
	Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China Tan X. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 In ultraviolet spectroscopy groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order it is important to control the groove shape precisely so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method the required blaze angle is small we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides since the etched groove shape depends on the aspect ratio of the photoresist mask ridge if we wish to fabricate larger gratings with this method we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
	低密度台阶形闪耀光栅的制作期刊论文 OAI收割中国激光, 2008, 卷号: 35, 期号: 2, 页码: 183, 186 贾伟; 周常河; 戴恩文; 底彩慧收藏 \| 浏览/下载：1383/147 \| 提交时间：2009/09/18 衍射与光栅闪耀光栅低密度衍射效率 Blazed grating Low density
	Study on the fabrication of blazed grating with sub-micrometer space on aluminum film (EI CONFERENCE) 会议论文 OAI收割 12th International Manufacturing Conference in China, IMCC2006, September 21, 2006 - September 23, 2006, Xi'an, China Lun S.; Hao D.; Qi X. 收藏 \| 浏览/下载：16/0 \| 提交时间：2013/03/25 The saw tooth grooves of blazed grating ruled by ruling engine are formed by diamond tool which presses on the aluminum film evaporated on the substrate of optical glass or metal. The real shape of ruled saw tooth groove is different from that of the ideal groove and the ruling process indicates that there are the zero order planes similar to the flat tops on the grating grooves. The results of Fourier analysis for the real ruled grating featuring the zero order plane structure shows that the flat top width is an important factor for grating efficiency. Additionally bigger pressure value loaded on the diamond tool and bigger lateral pressure value on the aluminum film will be benefit to the improvement of grating diffraction efficiency. Based on the grating interferometer the high precision positioning control system of ruling engine guarantees the accuracy of the grooves space. High density blazed grating whose space is 0.83p.m is manufactured and its' grooves spaces are very equidistant and uniform under the view field of AFM. And the infrared blazed grating whose diffraction efficiency in the first order is up to 97 percent is ruled successfully also.