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长春光学精密机械与物... [3]
自动化研究所 [2]
力学研究所 [1]
西安光学精密机械研究... [1]
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OAI收割 [7]
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会议论文 [4]
期刊论文 [3]
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2020 [1]
2013 [1]
2011 [2]
2009 [3]
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Materials ... [1]
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Testing of Annular Hyperboloid Mirror for Cassegrain System
会议论文
OAI收割
Xian, PEOPLES R CHINA, 2020-10-15
作者:
Hao, Sanfeng
;
Zhang, Jian
;
An, Fei
;
Yang, Jianfeng
  |  
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2021/07/23
Optical testing
Aspherics
Zernike polynomial
Compensator design
Optical coating
Neural sliding-mode load frequency controller design of power systems
期刊论文
OAI收割
NEURAL COMPUTING & APPLICATIONS, 2013, 卷号: 22, 期号: 2, 页码: 279-286
作者:
Qian, Dianwei
;
Zhao, Dongbin
;
Yi, Jianqiang
;
Liu, Xiangjie
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2015/08/12
Load frequency control
Sliding-mode control
Governor dead band (GDB)
Compensator design
Neural networks
Another look at linear compensator design: A classic control problem revisited
期刊论文
OAI收割
IEEE Circuits and Systems Magazine, 2011, 卷号: 11, 期号: 4, 页码: 45-50
作者:
Wang, Fei-Yue
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2015/08/12
linear compensator design
Rotating compensator sampling for spectroscopic imaging ellipsometry
期刊论文
OAI收割
Thin Solid Films, 2011, 卷号: 519, 期号: 9, 页码: 2742-2745
作者:
Meng YH(孟永宏)
;
Jin G(靳刚)
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2012/04/01
Rotating Compensator
Spectroscopic Imaging Ellipsometry
Spectroscopic Ellipsometry
Imaging Ellipsometry
Ellipsometry
Nanofilm Pattern
Microellipsometry
Design
Layers
Alignment of off-axis asphere and compensator with four poles (EI CONFERENCE)
会议论文
OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, November 19, 2008 - November 21, 2008, Chengdu, China
作者:
Li J.
;
Chen Y.
;
Li J.
;
Li J.
;
Wang P.
收藏
  |  
浏览/下载:57/0
  |  
提交时间:2013/03/25
Aspheres are utilized widely thanks to the development of optical design
manufacture and testing. Compensators are usually necessary when aspheres are under test. The alignment of aspheres and their compensators is a risk because it's tough to check whether the compensators work in right way. A new method of alignment with four poles is put forward in this paper. Optical interval error can be tight while it is quite important due to direct influence on central curvature
conic constant and high order coefficients of aspherical surface. A modified on-axis Foucault apparatus is set up since it makes the optical axis visible and helps to control the error of off-axis amount. Some small holes are drilled in the metallic cell of the compensator so that the ends of poles can be stably relied on in order to increase operational repeatability. The method has been carried out practically and it matches the measurement result given by a set of theodolites. 2009 SPIE.
The analysis and design of low velocity estimation based on observer (EI CONFERENCE)
会议论文
OAI收割
2009 IEEE International Conference on Automation and Logistics, ICAL 2009, August 5, 2009 - August 7, 2009, Shenyang, China
作者:
Wang D.
;
Zhang S.
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2013/03/25
Low velocity servo system needs precision velocity estimation. An observer for low velocity estimation was proposed in this paper. First
the source of low velocity estimation errors and the shortcomings of the single period difference were analyzed. The relationship between the estimation accuracy and estimator's frequency characteristics was concluded. Then
the structure of the observer was proposed. Frequency characteristics were used to design the compensator which can stabilize the observer. The stability of the observer was also discussed. At last
the observer's estimation accuracy was evaluated through a quantitative comparison. The results of simulation and experiment have shown that the quantized error in velocity estimation decreases dramatically when a velocity observer is used. Compared with some commonly-used estimators
the phase lag accompanying the observer is much less. 2009 IEEE.
Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE)
会议论文
OAI收割
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
作者:
Chen X.
;
Liu W.
;
Chen X.
;
Chen X.
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2013/03/25
High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods
the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well
we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper
MTF exceeds diffraction limit
an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface
root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system
the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02
a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.