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	A novel method for the design of diffractive optical elements based on the Rayleigh-Sommerfeld integral 期刊论文 OAI收割 OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 70, 页码: 38-44 作者: Pang, Hui; Yin, Shaoyun; Deng, Qiling; Qiu, Qi; Du, Chunlei 收藏 \| 浏览/下载：37/0 \| 提交时间：2015/07/10 Diffractive optics Computer holography Diffractive optical element Beam shaping
	A novel method for the design of diffractive optical elements based on the Rayleigh-Sommerfeld integral 期刊论文 OAI收割 OPTICS AND LASERS IN ENGINEERING, 2015, 卷号: 70, 页码: 38-44 作者: Pang, Hui; Yin, Shaoyun; Deng, Qiling; Qiu, Qi; Du, Chunlei \| 收藏 \| 浏览/下载：20/0 \| 提交时间：2018/03/15 Diffractive Optics Computer Holography Diffractive Optical Element Beam Shaping
	Study on the temperature field loaded by a shaped laser beam on the top surface of a cylinder head for thermal fatigue test 期刊论文 OAI收割 JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2014, 卷号: 9, 页码: 14038 作者: Nie SZ; Yu J; Yu G(虞钢); Tan QF; Fan ZW \| 收藏 \| 浏览/下载：28/0 \| 提交时间：2014/11/27 Temperature Field Shaped Laser Beam Diffractive Optics Element Thermal Fatigue Test
	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However the former has the disadvantage of weak intensity distribution controlling ability and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE light beam propagation distance and the structure of the beam shaping unit a method of determining the designing parameters is discussed. Using this method several illumination modes are realized and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last and it is proven to be feasible. 2010 SPIE.
	Imaging analysis of a novel compound diffractive telescope system (EI CONFERENCE) 会议论文 OAI收割 Optical Manufacturing and Testing VIII, August 4, 2009 - August 5, 2009, San Diego, CA, United states 作者: Liu H.; Liu Y.; Liu Y.; Liu Y.; Zhang H. 收藏 \| 浏览/下载：34/0 \| 提交时间：2013/03/25 The main feature of the compound diffractive telescope is the combination of diffractive optics with compound structure arranged eyepieces. In this paper a design of the compound diffractive telescope is firstly introduced and a 4.2 FOV is obtained with one primary lens and twenty-one eyepieces. Secondly image characteristic of different channels is analyzed with the design wavelength in ASAP and one modified phase function model of diffractive optical element is introduced to analyze the MTF curves for 0 FOV which provides a more accurate prediction of the performance of the system. Then the system is tested by the star image test and the diffraction limit images are got within 2 FOV. And finally two pictures taken from the adjacent FOV proved to be able to be spliced together. All the results above demonstrate that a good performance of the compound diffractive telescope. 2009 SPIE.