机构

• 长春光学精密机械与物... [1]
• 沈阳自动化研究所 [1]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [2]

发表日期

• 2020 [1]
• 2011 [1]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Two-layer structure predictive control of target tracking mode for dual time-scale system 会议论文  OAI收割 Shanghai, China, November 6-8, 2022 作者:  Wang HR(王洪瑞);  Zou T(邹涛);  Yang ZJ(杨志家);  Zheng HY(郑洪宇)   |  收藏  |  浏览/下载：40/0  |  提交时间：2021/03/14 Dual time-scale  Analogy integral variable  Two-layer structure  Predictive control   A nanometer scale alignment method of concentric spherical mirrors based on interferometry (EI CONFERENCE) 会议论文  OAI收割 4th IEEE International Nanoelectronics Conference, INEC 2011, June 21, 2011 - June 24, 2011, Tao-Yuan, Taiwan 作者:  Xu T. 收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25 A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed  which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors  the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers. 2011 IEEE.