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	Broadband Electrical Impedance Matching of Transmitter Transducer for Acoustic Logging While Drilling Tool 期刊论文 OAI收割 IEEE SENSORS JOURNAL, 2022, 卷号: 22, 期号: 2, 页码: 1382-1390 作者: Gou, Yang; Fu, Xin \| 收藏 \| 浏览/下载：32/0 \| 提交时间：2022/07/05 Acoustic logging while drilling tool electrical impedance-matching network piezoelectric transducer simulation and experiment
	Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文 OAI收割 Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4 作者: Miao, J(苗静); Shen, WJ(沈文江); He, CD; Xue, CY; Xiong, JJ 收藏 \| 浏览/下载：84/0 \| 提交时间：2015/12/31 silicon elemental semiconductors silicon-on-insulator wafer bonding electromechanical effects ultrasonic transducers capacitive transducers micromechanical devices micromachining vibrations membranes finite element analysis reliability capacitance electromechanical coupling coefficient capacitive micromachined ultrasonic transducer impedance matching propagation medium microelectromechanical system capacitive ultrasonic transducer silicon on insulator wafer bonding optimum geometric dimensions membrane mechanical vibration electrical characteristics finite-element analysis operation mode device safety device reliability equivalent stress operation-collapse voltage bottom electrodes glass substrate surface parallel parasitic capacitance Si SiO2
	Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers 期刊论文 OAI收割 Sensors & Transducers Journal, 2013, 卷号: 18, 期号: SPEC.ISS.1, 页码: 66-75 作者: Wei YJ(魏阳杰); Herzog, Thomas; Heuer, Henning 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/10/05 Electrode size Electrical impedance matching Stacked transducer Ultrasonic transducer.