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	Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy 期刊论文 OAI收割 OPTICS EXPRESS, 2018, 卷号: 26, 期号: 3, 页码: 2944-2953 作者: Xie, Zhongye; Tang, Yan \| 收藏 \| 浏览/下载：33/0 \| 提交时间：2019/08/23 Digital devices Film thickness Interferometry Modulation Thickness measurement
	Thickness measurement of transparent film by white-light interferometry 期刊论文 OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506 作者: Deng, Qinyuan; Zhou, Yi; Liu, Junbo; Yao, Jingwei; Hu, Song \| 收藏 \| 浏览/下载：33/0 \| 提交时间：2018/06/14 Film Thickness Manufacture Materials Testing Optical Devices Optical Films Reflection Reflectometers Structural Design Thickness Gages Thickness Measurement Thin Films
	Visualization of Film Wavelike Characteristics and Measurement of Film Thickness in Spray Cooling 期刊论文 OAI收割 JOURNAL OF THERMAL SCIENCE, 2013, 卷号: 22, 期号: 2, 页码: 186-195 作者: Hou, Yan; Tao, Yujia; Huai, Xiulan 收藏 \| 浏览/下载：30/0 \| 提交时间：2015/10/23 Spray cooling Visualization Film thickness measurement Film wavelike characteristics
	Visualization of Film Wavelike Characteristics and Measurement of Film Thickness in Spray Cooling 期刊论文 OAI收割 JOURNAL OF THERMAL SCIENCE, 2013, 卷号: 22, 期号: 2, 页码: 186，195 Yan Hou 1 2; Yujia Tao 1; Xiulan Huai 1 收藏 \| 浏览/下载：18/0 \| 提交时间：2013/04/27 Spray cooling Visualization Film thickness measurement Film wavelike characteristics
	Effect of thickness on the structural, electrical and optical properties of ZnO films deposited by MBE (EI CONFERENCE) 会议论文 OAI收割 2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011, September 16, 2011 - September 18, 2011, Guangzhou, China Yang X.; Su S.; Yi X.; Mei T. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 A set of ZnO films of different thickness have been deposited on sapphire substrates using molecular beam epitaxy (MBE) by varying the growth time and the effect of film thickness on the structural electrical and optical properties have been investigated. The X-ray diffraction (XRD) results indicate that the full width at half maximum (FWHM) of the (002) diffraction peak is decreased as the film thickness increasing and the stress along c-axis is stable. Scanning electron microscope (SEM) measurement shows that the grains become more uniform as the film grows thicker and the film surface present distinct hexagon shape as the film is grown up to a thickness of 500nm. The optical absorbance Hall mobility and photoluminescence (PL) intensity are increased in accordance with the thickness of the film. (2011) Trans Tech Publications Switzerland.
	几种分子尺度润滑薄膜的制备和表征学位论文 OAI收割博士: 中国科学院研究生院, 2006 庞重军收藏 \| 浏览/下载：52/0 \| 提交时间：2013/05/24 分子润滑薄膜制备与表征全氟聚醚角角分辨XPS 薄膜厚度测定 Molecularly thin lubricating film Preparation and characterization Perfluoropolyether Angle-resolved XPS Film thickness measurement
	Study of micro-actuator with electrostatic actuating (EI CONFERENCE) 会议论文 OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者: Liu C.-X.; Liu C.-X. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed which is actuated by electrostatic force. Based on the torsion dynamics theory the technique and relative formula are presented for analyzing the actuating voltage and the switching time on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10m length and width of the cantilever beam are 1900 and 1000m length and width of the balance beam are 100 and 1000m and distance of the upper and lower electrodes is 55m respectively. The actuating voltage is about 50 V and the switching time Toff and Ton are about 5 and 12 ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally an optical technique is described for the measurement of the actuating voltage and switching time of the device and the difference between the experimental results and theoretical datum is discussed.