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Optical properties of K9 glass waveguides fabricated by using carbon-ion implantation 期刊论文  OAI收割
journal of the korean physical society, 2016, 卷号: 69, 期号: 2, 页码: 169-173
作者:  
Liu, Chun-Xiao;  Wei, Wei;  Fu, Li-Li;  Zhu, Xu-Feng;  Guo, Hai-Tao
收藏  |  浏览/下载:19/0  |  提交时间:2016/10/10
FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process 期刊论文  OAI收割
OPTICAL REVIEW, 2015, 卷号: 22, 期号: 3, 页码: 393-401
作者:  
Shen Li-Jun;  Wan Yong-Jian;  Meng Kai;  Huang Chuan-Ke
收藏  |  浏览/下载:25/0  |  提交时间:2015/09/21
Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文  OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
收藏  |  浏览/下载:25/0  |  提交时间:2013/03/25
In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
掺铒磷酸盐玻璃离子交换波导表面保护的研究 期刊论文  OAI收割
光子学报, 2008, 卷号: 37, 期号: 2, 页码: 238, 241
韩秀友; 初凤红; 蔡海文; 方祖捷; 赵明山
收藏  |  浏览/下载:1595/623  |  提交时间:2009/09/18
K9玻璃薄膜对离子交换磷酸盐玻璃波导表面保护的优化研究 期刊论文  OAI收割
光学学报, 2008, 卷号: 28, 期号: 1, 页码: 115, 118
韩秀友; 初凤红; 蔡海文; 方祖捷; 赵明山
收藏  |  浏览/下载:842/172  |  提交时间:2009/09/18
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE) 会议论文  OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:  
Li W.;  Tang Y.;  Yu H.;  Gao J.;  Li W.
收藏  |  浏览/下载:63/0  |  提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper  photoresist melting method  which is low-cost  short-period and easy realization  is presented. In addition  the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension  when developed photoresist is heated to be melting state by this method. In experiment  when the melted photoresist grating is etched by ion beam  the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate  then the surface is evaporated by aluminum using vacuum evaporation  holographic grating with preferable groove profile is successively fabricated.  
飞秒激光辐照K9玻璃引起的暗化和折射率变化 期刊论文  OAI收割
中国激光, 2005, 卷号: 32, 期号: 1, 页码: 119, 122
周秦岭; 刘丽英; 徐雷; 王文澄; 邱建荣; 朱从善; 于福熹
收藏  |  浏览/下载:1887/171  |  提交时间:2009/09/24