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	Measurement of lens parameters based on Shack-Hartmann wavefront sensor 期刊论文 OAI收割 Optics and Lasers in Engineering, 2024, 卷号: 184, 期号: 10, 页码: 108666 -1-11 作者: Deng ZJ(邓子衿); Li CW(李常伟); Zhang SJ(张思炯) \| 收藏 \| 浏览/下载：1/0 \| 提交时间：2025/12/30 Lens testing Shack-Hartmann wavefront sensor non-interferometry
	Simulation test and inhibit method of forward scattered stray light of polarized beam split optical antenna 期刊论文 OAI收割 guangzi xuebao/acta photonica sinica, 2016, 卷号: 45, 期号: 4 作者: Lü, Juan; Ma, Xiao-Long; He, Ying-Hong; Yan, Xing-Tao; Xie, Pei-Yue 收藏 \| 浏览/下载：43/0 \| 提交时间：2016/11/23 Antennas Coherent scattering Forward scattering Lens antennas Lenses Optical communication Optical instruments Roads and streets Testing
	High-resolution Fourier lens design (EI CONFERENCE) 会议论文 OAI收割 2011 International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011, August 12, 2011 - August 14, 2011, Harbin, China Gu S.; Liu C.; Jin G. 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/03/25 This Fourier lens system is often used in optical signal processing system. Based on the design principles of Fourier lens system and the requirements of some particles observation experiment a Fourier optical system whose working wavelength was 532nm was designed using ZEMAX. The testing experiment using the visual microscope showed that the system's resolution was 250lp/mm. And the system was successfully used in the particles observation experiment. 2011 IEEE.
	The optical design of cubic phase plate testing system (EI CONFERENCE) 会议论文 OAI收割 2011 Symposium on Photonics and Optoelectronics, SOPO 2011, May 16, 2011 - May 18, 2011, Wuhan, China 作者: Zhang X.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/03/25 Computer-generated holograms (CGH) have been widely used for years in optical testing of aspheric surfaces in combination with Fizeau interferometers. With the development of diffraction optics computer technology and micro-processing technology the accuracy of the CGH testing can achieve a hundredth of a wave and the cost is reduced greatly. CGH is capable of producing an optical wavefront with any desired shape. So it is fascinating and will have good prospects to test free-form surfaces using CGH. As the CGH can create any wavefront shape it can also be used in unsymmetrical aspherical surfaces testing. Taking the cubic surface as an example this paper gives a method to test unsymmetrical surfaces. This paper gives the design to test a cubic surface. And the separation of the diffraction orders and the binary process of the continuous CGH phase function are discussed in detail. The alignment tolerance of the test system and the CGH fabrication tolerance are analyzed. We also present an idea using a CGH and two spherical lenses as null lens to test the cubic surface when the surface deviation is great. 2011 IEEE.
	Temperature gradients effect on surface test with high precise interferometer (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者: Gu Y.-Q.; Yang H.-J.; Sui Y.-X.; Zhang J.; Zhang J. 收藏 \| 浏览/下载：57/0 \| 提交时间：2013/03/25 In high precise surface testing temperature stability and uniformity are of paramount importance to the high accuracy of test results. Micro-temperature variation and temperature gradients not only cause the change of the air refractive index and lead to the optical path variation in interferometer cavity but also result in deformation of the tested surface itself which always brings about errors to the test results. Temperature effects on the interferometer cavity and the tested surface are analyzed from the axial and radial directions in this letter. Temperature model of the interferometer cavity and the tested lens are established and quantitative calculations and diagram of test results versus temperature and lens dimension are provided. It shows that temperature gradients effect increase with the length of the interferometer and the dimension of the tested lens. The interferometer cavity is mainly affected by radial temperature gradients while the tested lens is mainly affected by the axial temperature gradients. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Design and fabrication of CGH for aspheric surface testing and its experimental comparison with null lens (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者: Zhao J.; Zhang X.; Zhang X.; Zhang X.; Li F. 收藏 \| 浏览/下载：52/0 \| 提交时间：2013/03/25 Computer-generated hologram (CGH) is an effective way to compensate wavefront in null test of aspheric surfaces and freeform surfaces. Our strategies of CGH design and fabrication for optical testing are presented and an experiment demonstrating the compensation results of CGH and null lens is also reported. In order to design complex CGH software was developed with which we can design a CGH including three sections: main section for compensating wavefront in null test alignment section for adjusting the relative position between CGH and interferometer and fiducial section for projecting fiducial marks around the optics under test. The design result is represented in GDS II format file which could drive a laser-direct-writer- machine to fabricate a photomask. Then a 1:1 replication process is applied to duplicate the patterns from photomask to a parallel optical substrate whose surface is error better than /60 rms. Finally an off-axis aspheric surface was tested with CGH and null lens respectively. The test result with CGH (0.019rms) is almost the same as the result with null lens (0.020 rms). This experiment also demonstrated that fiducial marks projected by CGH can be used to guide the alignment of the optics and measurement of its off-axis distance. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文 OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China 作者: Chen X.; Liu W.; Chen X.; Chen X. 收藏 \| 浏览/下载：44/0 \| 提交时间：2013/03/25 High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper MTF exceeds diffraction limit an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02 a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
	扫描型哈特曼检测装置研究期刊论文 OAI收割强激光与粒子束, 2005, 卷号: 17, 期号: 9, 页码: 1377, 1381 刘丹; 闫岩; 任冰强; 赵永凯; 黄立华; 黄惠杰; 王向朝收藏 \| 浏览/下载：1648/215 \| 提交时间：2009/09/24 光学检测 Optical testing 哈特曼检验法 Hartmann test 扫描式哈特曼光阑 Scanning 非球面准直物镜 Hartmann screen 球差 Aspheric collimating lens 波像差 Longitudinal aberration 能量集中度 Optical path difference Encircled energy