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CAS IR Grid
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长春光学精密机械与物... [1]
上海光学精密机械研究... [1]
上海硅酸盐研究所 [1]
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期刊论文 [2]
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2016 [1]
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光学薄膜 [1]
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Effects of HfO2 Interlayer on Microstructure and Mechanical Property of Al2O3 Thin Film on MgF2 Substrate
期刊论文
OAI收割
JOURNAL OF INORGANIC MATERIALS, 2016, 卷号: 31, 期号: 7, 页码: 779-784
作者:
Song Bo
;
Zhao Li-Li
;
Chen Xiao-Ying
;
You Li-Jun
;
Song Li-Xin
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2017/02/27
HfO2 interlayer
Al2O3 thin film
microstructure
mechanical properties
MgF2 substrate
Effect of deposition rate on the DUV/VUV reflectance of MgF2 protected aluminum mirrors with e-beam evaporation (EI CONFERENCE)
会议论文
OAI收割
7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China
作者:
Wang T.-T.
;
Gao J.-S.
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  |  
浏览/下载:30/0
  |  
提交时间:2013/03/25
Aluminum mirrors were freshly fabricated under optimum conditions protected with MgF2 at various deposition rates which evaporated by e-beam. All the samples were deposited on fine polished fused silica substrate. The reflectance results were measured by Mcpherson Vuvas2000 spectrometer in DUV/VUV spectral region from 150nm to 350nm. The highest reflectance is chosen to 210nm
and the point of 160nm is also very important for the project
so the results of two points are detailed presented. The highest average reflectance is about 86.76% with the MgF2 deposition rate at 1.2nm/s. The effects of aging on the reflectance of the MgF2 protected aluminum mirrors are discussed. 2011 SPIE.
Influence of substrate temperature on properties of MgF2 coatings
期刊论文
OAI收割
appl. surf. sci., 2007, 卷号: 253, 期号: 14, 页码: 6113, 6117
Yu Hua
;
Qi Hongji
;
Cui Yun
;
Shen Yanming
;
邵建达
;
范正修
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  |  
浏览/下载:860/209
  |  
提交时间:2009/09/22
thermal boat evaporation
MgF2 single-layer coating
substrate temperature
LIDT