中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
机构
采集方式
内容类型
发表日期
学科主题
筛选

浏览/检索结果: 共7条,第1-7条 帮助

条数/页: 排序方式:
Online tool wear monitoring by super-resolution based machine vision 期刊论文  OAI收割
COMPUTERS IN INDUSTRY, 2023, 卷号: 144
作者:  
Zhu, Kunpeng;  Guo, Hao;  Li, Si;  Lin, Xin
  |  收藏  |  浏览/下载:48/0  |  提交时间:2022/12/22
Experimental study on water jet guided laser micro-machining of mono-crystalline silicon 期刊论文  OAI收割
Optics and Laser Technology, 2021, 卷号: 140, 页码: 1-7
作者:  
Qiao HC(乔红超);  Cao ZH(曹治赫);  Cui JF(崔建丰);  Zhao JB(赵吉宾)
  |  收藏  |  浏览/下载:26/0  |  提交时间:2021/04/13
Computer-aided alignment method of optical lens with high accuracy 会议论文  OAI收割
8th international symposium on advanced optical manufacturing and testing technology (aomatt) - optical test, measurement technology, and equipment, suzhou, peoples r china, 2016-04-26
作者:  
Song Xing;  Hou Xiao-hua;  Zhang Xue-min;  Ji Bin-dong
收藏  |  浏览/下载:35/0  |  提交时间:2016/12/02
Fabrication of polycrystalline diamond tools by micro electrodischarge machining (EI CONFERENCE) 会议论文  OAI收割
8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011, November 20, 2011 - November 22, 2011, Hangzhou City, China
Zhang Z.; Peng H.; Yan J.; Kuriyagawa T.
收藏  |  浏览/下载:98/0  |  提交时间:2013/03/25
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文  OAI收割
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
作者:  
Li Y.;  Li Y.;  Li Y.;  Li Y.;  Wang H.
收藏  |  浏览/下载:23/0  |  提交时间:2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work  mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then  the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation  but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.  
A micro diffuser/nozzle pump with fins on the sidewall 会议论文  OAI收割
4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, June 10, 2007 - June 14, 2007
作者:  
Li XH;  Yu XM;  Zhang DC;  Li ZH;  Xu WH
收藏  |  浏览/下载:23/0  |  提交时间:2017/06/01
Micro-jet pump for micro-fluidic systems 会议论文  OAI收割
1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, January 18, 2006 - January 21, 2006
作者:  
Li XH;  Yu XM;  Cui HH(崔海航);  Li ZH(李战华);  Zhang DC
收藏  |  浏览/下载:38/0  |  提交时间:2017/06/01