机构

• 光电技术研究所 [3]
• 长春光学精密机械与物... [2]

采集方式

• OAI收割 [5]

内容类型

• 期刊论文 [3]
• 会议论文 [2]

发表日期

• 2015 [2]
• 2014 [1]
• 2009 [2]

学科主题

筛选

浏览/检索结果: 共5条，第1-5条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System 期刊论文  OAI收割 IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 6 作者:  Zhou, Yi;  Zhu, Jiangping;  Deng, Qinyuan;  Liu, Junbo;  Si, Xinchun 收藏  |  浏览/下载：35/0  |  提交时间：2016/02/03 Moire fringes  magnification  grating marks  phase analysis   Moire-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment 期刊论文  OAI收割 IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4 作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei 收藏  |  浏览/下载：41/0  |  提交时间：2015/07/10 Moire fringes  measurement range  wafer-mask alignment  lithography   A Moire-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography 期刊论文  OAI收割 IEEE PHOTONICS JOURNAL, 2014, 卷号: 6, 期号: 4 作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi 收藏  |  浏览/下载：37/0  |  提交时间：2015/07/10 Moire fringes  focusing and leveling  fringe analysis  lithography   Small roll angle measurement based on auto-collimation and moire fringe (EI CONFERENCE) 会议论文  OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China Bai X.-G.; Cai S.; Qiao Y.-F.; Dai M. 收藏  |  浏览/下载：37/0  |  提交时间：2013/03/25 A novel method for small roll angle measurement based on auto-collimation and moire fringe is presented. A right-angle prism is used as an indicator of small roll angle around the optical axis  and a CCD is used to collect moire fringes that are generated by scale grating image which is reflected by prism and index grating. Any small roll angle of the prism will change the include angle of the grating pair and meanwhile induce a change in the moire fringe period. The relationship between roll angle and period of moire fringes is established. The period data is obtained by image processing. The experimental result certifies that the principle of small angle measurement method based on auto-collimation and moire fringe is correct and feasible. The measuring error is smaller than 0.2 within 7 range compared with 0.2 autocollimator. 2009 SPIE.   Influence of a general small inclination of two gratings on the moire fringe (EI CONFERENCE) 会议论文  OAI收割 CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics, August 30, 2009 - September 3, 2009, Shanghai, China Cai S.; Qiao Y.-F. 收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25 The effect of a general small inclination between the two grating planes on the period of the moire fringes under illumination with a plane wave is studied. 2009 IEEE.