机构

• 长春光学精密机械与物... [1]
• 自动化研究所 [1]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [1]
• 期刊论文 [1]

发表日期

• 2019 [1]
• 2010 [1]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion 期刊论文  OAI收割 IEEE ACCESS, 2019, 卷号: 7, 页码: 183070-183080 作者:  Du, Zhangming;  Zhou, Chao;  Zhang, Tianlu;  Deng, Lu;  Cao, Zhiqiang   |  收藏  |  浏览/下载：27/0  |  提交时间：2020/03/30 Nano-scale measurement  multi-rate fusion  self-sensing  TDC   White-light spectral scanning interferometry for surface measurement system (EI CONFERENCE) 会议论文  OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者:  Wang C. 收藏  |  浏览/下载：27/0  |  提交时间：2013/03/25 The paper introduces the white-light spectral scanning interferometry for surface measurement. This interferometry can be used to measure the roughness of both smooth surfaces and those with large step heights. This real-time surface measurement can be achieved using acousto-optic tuneable filtering (AOTF) technique without mechanical scanning. At first  the structure and principle of this interferometry is introduced. Then the algorithm of the surface roughness measurement is proposed. What's more  the experiment with standard test piece is conducted. Compared with the traditional laser-light interferometry  the data shows that the proposed method has a higher accuracy which is proved to be nano-scale. A conclusion is given at last in which the superiorities and the limitations of the proposed system were discussed. 2010 SPIE.