中国科学院机构知识库网格系统: 检索

Sensor-Based Inspection of the Formation Accuracy in Ultra-Precision Grinding (UPG) of Aspheric Surface Considering the Chatter Vibration 期刊论文 OAI收割
Photonic Sensors, 2018, 卷号: 8, 期号: 2, 页码: 97-102
作者: Lei, Y.; Bai, Y.; Xu, Z. J.

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收藏 | 浏览/下载：15/0 | 提交时间：2019/09/17

Optical aspheric surface micro-vibrations ultra-precision grinding formation accuracy grinding speed system Instruments & Instrumentation Optics

Design and Fabrication of CGH for 600mm diameter SiC primary mirror surface figure testing 会议论文 OAI收割
8th international symposium on advanced optical manufacturing and testing technology (aomatt) - optical test, measurement technology, and equipment, suzhou, peoples r china, 2016-04-26
作者: Pang Zhihai; Ma Zhen; Fan Xuewu; Zou Gangyi

收藏 | 浏览/下载：30/0 | 提交时间：2016/12/02

Computer-generated hologram Aspheric surface Optical testing Alignment

Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test 期刊论文 OAI收割
OPTICS AND LASERS IN ENGINEERING, 2012, 卷号: 50, 期号: 2, 页码: 165-169
作者: Guo, Chunfeng; Su, Xianyu; Chen, Wenjing; Lei, Baiping; Wu, Fan

收藏 | 浏览/下载：25/0 | 提交时间：2015/07/10

Optical testing Aspheric mirror Ronchi test 3D surface measurement Fringe analysis

Technology on fabrication of precise SiC aspherical mirror (EI CONFERENCE) 会议论文 OAI收割
2011 International Conference on Materials and Products Manufacturing Technology, ICMPMT 2011, October 28, 2011 - October 30, 2011, Chengdu, China
Zhang Z.

收藏 | 浏览/下载：26/0 | 提交时间：2013/03/25

This paper represents a technique to produce the large size optical aspherical mirror by using reaction-bonded silicon carbide to meet the material requirements of the space used mirrors based on the characters comparison of all types mirror material. Techniques are described in this paper including the bonding procedure of silicon carbide to form a mirror shape the CCOM technology for aspheric grinding polishing on a home-developed tool -FSGJ-2 and the aspheric profilometry. A specialized Offner Null lens is also developed to measure the aspherical mirror with laser interferometer. With the technology depicted in the paper a 502mm 298 mm off-axis SiC aspherical mirror is successfully made with a surface accuracy better than 1/50rms the final result meets the design requirement. (2011) Trans Tech Publications.

The optical design of cubic phase plate testing system (EI CONFERENCE) 会议论文 OAI收割
2011 Symposium on Photonics and Optoelectronics, SOPO 2011, May 16, 2011 - May 18, 2011, Wuhan, China
作者: Zhang X.; Zhang X.; Zhang X.; Zhang Y.

收藏 | 浏览/下载：19/0 | 提交时间：2013/03/25

Computer-generated holograms (CGH) have been widely used for years in optical testing of aspheric surfaces in combination with Fizeau interferometers. With the development of diffraction optics computer technology and micro-processing technology the accuracy of the CGH testing can achieve a hundredth of a wave and the cost is reduced greatly. CGH is capable of producing an optical wavefront with any desired shape. So it is fascinating and will have good prospects to test free-form surfaces using CGH. As the CGH can create any wavefront shape it can also be used in unsymmetrical aspherical surfaces testing. Taking the cubic surface as an example this paper gives a method to test unsymmetrical surfaces. This paper gives the design to test a cubic surface. And the separation of the diffraction orders and the binary process of the continuous CGH phase function are discussed in detail. The alignment tolerance of the test system and the CGH fabrication tolerance are analyzed. We also present an idea using a CGH and two spherical lenses as null lens to test the cubic surface when the surface deviation is great. 2011 IEEE.

Investigation of Sub-aperture Polish Techniques for Manufacturing Astronomical Mirror 会议论文 OAI收割
San Diego, California, USA, 2010-6-27
作者: Jiang Zi-bo; Li Xin-nan; Zheng Yi; Guo Wei-yuan; Liang Bin

收藏 | 浏览/下载：24/0 | 提交时间：2014/01/03

Aspheric mirror optical manufacture computer control optical surface ion beam figuring

Design and fabrication of CGH for aspheric surface testing and its experimental comparison with null lens (EI CONFERENCE) 会议论文 OAI收割
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China
作者: Zhao J.; Zhang X.; Zhang X.; Zhang X.; Li F.

收藏 | 浏览/下载：34/0 | 提交时间：2013/03/25

Computer-generated hologram (CGH) is an effective way to compensate wavefront in null test of aspheric surfaces and freeform surfaces. Our strategies of CGH design and fabrication for optical testing are presented and an experiment demonstrating the compensation results of CGH and null lens is also reported. In order to design complex CGH software was developed with which we can design a CGH including three sections: main section for compensating wavefront in null test alignment section for adjusting the relative position between CGH and interferometer and fiducial section for projecting fiducial marks around the optics under test. The design result is represented in GDS II format file which could drive a laser-direct-writer- machine to fabricate a photomask. Then a 1:1 replication process is applied to duplicate the patterns from photomask to a parallel optical substrate whose surface is error better than /60 rms. Finally an off-axis aspheric surface was tested with CGH and null lens respectively. The test result with CGH (0.019rms) is almost the same as the result with null lens (0.020 rms). This experiment also demonstrated that fiducial marks projected by CGH can be used to guide the alignment of the optics and measurement of its off-axis distance. 2010 Copyright SPIE - The International Society for Optical Engineering.

Optical system of large relative aperture and wide field using aspheric corrector for detecting (EI CONFERENCE) 会议论文 OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者: Zhang J.; Zhang J.; Zhang J.; Wang J.

收藏 | 浏览/下载：22/0 | 提交时间：2013/03/25

The magnitude requirement of space target detecting determines that the image of detecting telescope should have several performances: small spots the wider field of view small 80% encircled energy diameter and good MTF(Modulation transfer function). So the aperture and field of view of optical system have some demands accordingly. The larger aperture the more extensive range which the telescope searches. Now most of ground telescopes whose apertures are from 500mm to 1000mm is on-axis optical system the more energy that telescope collects and higher magnitude the telescope detects so wide field of view becomes the most importance problem. To obtain large relative aperture and wide field of view the paper introduces a catadioptric telescope with small aperture aspheric refractive corrector whose conic surface will be used to remove the aberrations due to large relative aperture and wide field of view. As to the optical system there is only one aspheric refractive corrector and it is relatively easy for manufacturing because of its concave figure and normal material. The paper gives the example and optimizes this optical system with ZEMAX program. And then the paper provides a specific analysis program for testing the aspheric refractive corrector. The aperture of this optical system is 750mm and its relative aperture is 0.82 and the field of view is 3.6 diameter(diagonal). Its structure is simple and the image quality is also very good. 2009 SPIE.

Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文 OAI收割
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
作者: Chen X.; Liu W.; Chen X.; Chen X.

收藏 | 浏览/下载：29/0 | 提交时间：2013/03/25

High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper MTF exceeds diffraction limit an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02 a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.

Multi-mode combined manufacturing technology for large aperture aspheric mirrors (EI CONFERENCE) 会议论文 OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Large Mirrors and Telescopes, July 8, 2007 - July 12, 2007, Chengdu, China
作者: Li J.; Xuan B.; Li J.; Li J.

收藏 | 浏览/下载：16/0 | 提交时间：2013/03/25

In the field of manufacturing large aperture aspheric mirrors mid-frequency surface error has been considered to be one of the most important factors for both manufacturing and testing technique. Mid-frequency surface error controlling the polishing process is not conventionally concerned as the same of controlling of low-frequency surface error. In order to solve such a problem a new method - Multi-mode Combined Manufacturing (MCM) is put forward. MCM technology is useful for the control on all frequency-bands errors of optical surface and is adaptive to fast aspheric mirror especially. Based on classical manufacturing theory principle analysis of MCM and experiments results are discussed in the paper.