中国科学院机构知识库网格系统: 检索

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	Single multimode fiber focused spot scanning based on a liquid crystal spatial light modulator 会议论文 OAI收割 Shanghai, China, 2020-10-17 作者: Zhang, Zaikun; Geng, Yi; Chen, Hui \| 收藏 \| 浏览/下载：30/0 \| 提交时间：2021/01/20 single multimode fiber parallel phase compensation method phase mask focused spots spatial light modulator two-step phase-shifting technique specklegrams wavefront shaping
	Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文 OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者: Yan, Guanyong; Wang, Xiangzhao; Li, Sikun; Yang, Jishuo; Xu, Dongbo 收藏 \| 浏览/下载：32/0 \| 提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH POINT-SPREAD FUNCTIONS PHASE-SHIFTING MASK LITHOGRAPHIC TOOLS PROJECTION OPTICS COMA MEASUREMENT ILLUMINATION COMPUTATION
	Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文 OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者: Yan, Guanyong; Wang, Xiangzhao; Li, Sikun; Yang, Jishuo; Xu, Dongbo 收藏 \| 浏览/下载：17/0 \| 提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH POINT-SPREAD FUNCTIONS PHASE-SHIFTING MASK LITHOGRAPHIC TOOLS PROJECTION OPTICS COMA MEASUREMENT ILLUMINATION COMPUTATION
	Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method 期刊论文 OAI收割 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 卷号: 8, 期号: 3, 页码: 13 作者: Zong, Ke; Zeng, Xuan; Ji, Xia; Cai, Wei \| 收藏 \| 浏览/下载：22/0 \| 提交时间：2018/07/30 lithography simulation phase-shifting mask spectral method eigen oscillations discontinuous Galerkin method Schwarz domain decomposition iteration