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	屏蔽罩分离控制关键技术研究学位论文 OAI收割工程硕士, 中国科学院自动化研究所: 中国科学院大学, 2013 谢兴先收藏 \| 浏览/下载：25/0 \| 提交时间：2015/09/02 屏蔽罩 PMAC 交流伺服轨迹规划 shroud PMAC AC servo trajectory planning
	Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE) 会议论文 OAI收割 ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China Liang F.; Hu J. 收藏 \| 浏览/下载：21/0 \| 提交时间：2013/03/25 The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS several key techniques as follows are introduced. Firstly the unique system configuration four axes mutually intersecting at the center of the SS is adopted which ensures the shape of the focus be maintained circular during the writing period. Secondly an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly to guarantee the linear velocity to accord with the exposure character of the photoresist all the time an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m and the steep sides of the lines are parallel to each other.
	基于PMAC开放式数控系统软件开发期刊论文 OAI收割机械设计与制造, 2006, 卷号: 44, 期号: 11, 页码: 49-51 作者: 孟淑娟; 刘建伟; 高世一 \| 收藏 \| 浏览/下载：11/0 \| 提交时间：2010/11/29 Pmac 开放式数控系统软件开发
	PMAC在开放式数控绕丝机系统中的应用会议论文 OAI收割中国无锡, 2004 作者: 郭彤颖; 王海忱; 曲道奎; 赵强 \| 收藏 \| 浏览/下载：17/0 \| 提交时间：2010/12/01 Pmac Plc 张力控制开放式数控系统绕丝机
	基于Windows平台的开放式并联机床数控系统期刊论文 OAI收割制造业自动化, 2002, 卷号: 24, 期号: 1, 页码: 15-17，55 作者: 陈文家; 赵明扬; 杨玲; 房立金 \| 收藏 \| 浏览/下载：14/0 \| 提交时间：2010/11/29 5坐标并联机床 pmac+ipc 开放式数控系统关键技术