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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [1]
武汉岩土力学研究所 [1]
上海光学精密机械研究... [1]
采集方式
OAI收割 [3]
内容类型
期刊论文 [2]
会议论文 [1]
发表日期
2023 [1]
2010 [1]
2008 [1]
学科主题
Engineerin... [1]
Geology [1]
激光技术;激光物理与... [1]
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Strength, deformation, and failure characteristics of hollow cylinder sandstone under axial-torsional tests
期刊论文
OAI收割
BULLETIN OF ENGINEERING GEOLOGY AND THE ENVIRONMENT, 2023, 卷号: 82, 期号: 8, 页码: -
作者:
Jiang, Yue
;
Zhou, Hui
;
Lu, Jingjing
;
Gao, Yang
;
Li, Zhen
  |  
收藏
  |  
浏览/下载:96/0
  |  
提交时间:2023/08/02
Axial-torsional test
Hollow cylinder sandstone
Principal stress axis rotation
Rock strength
Deformation characteristics
Crack propagation
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE)
会议论文
OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:
Zhao Y.
;
Zhang W.
;
Zhang W.
;
Li S.
;
Gong Y.
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However
the former has the disadvantage of weak intensity distribution controlling ability
and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized
and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE
light beam propagation distance
and the structure of the beam shaping unit
a method of determining the designing parameters is discussed. Using this method
several illumination modes are realized
and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last
and it is proven to be feasible. 2010 SPIE.
Fine interference fringes formed in high-order harmonic spectra generated by infrared driving laser pulses
期刊论文
OAI收割
phys. rev. a, 2008, 卷号: 78, 期号: 3, 页码: 33841
Xu Han
;
Xiong Hui
;
曾志男
;
Fu Yuxi
;
Yao Jinping
;
李儒新
;
程亚
;
徐至展
收藏
  |  
浏览/下载:1285/223
  |  
提交时间:2009/09/18
A-center
Argon gas
Driving pulse
Harmonic spectrum
High-order
High-order harmonic generation
Interference fringe pattern
Interference fringes
Phase-matching conditions
Propagation axis