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	Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography 期刊论文 OAI收割 MICROELECTRONIC ENGINEERING, 2017, 卷号: 170, 页码: 49-53 作者: Zhao, J; Wu, YQ; Xue, CF; Yang, SM; Wang, LS \| 收藏 \| 浏览/下载：35/0 \| 提交时间：2017/12/08 Periodic Structures Scintillator Soft X-ray Interference Lithography High Aspect Ratio
	Fabrication of a 256-bits organic memory by soft x-ray lithography 期刊论文 OAI收割 CHINESE PHYSICS B, 2010, 卷号: 19, 期号: 5 作者: Liu Xing-Hua; Lu Wen-Sheng; Ji Zhuo-Yu; Tu De-Yu; Zhu Xiao-Li \| 收藏 \| 浏览/下载：28/0 \| 提交时间：2019/04/09 Molecular Memory Crossbar Array Soft X-ray Lithography Electron Beam Lithography
	The study on the epoxy resin compound X-ray refractive lens (EI CONFERENCE) 会议论文 OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者: Wang W.; Zhang J.; Zhang J.; Zhang J.; Wang W. 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/03/25 In this paper the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first the theoretical results of the structure parameters for such a device are given. Then the fabrication technologies are presented. They are deep soft X-ray lithography mold-manufacturing and molding. The material of X-ray photoresist is PMMA the mold is made of silicone rubber and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.