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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
上海光学精密机械研究... [6]
长春光学精密机械与物... [1]
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OAI收割 [7]
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期刊论文 [4]
学位论文 [2]
会议论文 [1]
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2011 [1]
2008 [1]
2007 [1]
2006 [1]
2005 [1]
学科主题
光学工程 [2]
激光技术 [1]
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Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE)
会议论文
OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
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浏览/下载:25/0
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提交时间:2013/03/25
In ultraviolet spectroscopy
groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore
there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order
it is important to control the groove shape precisely
so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm
especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method
the required blaze angle is small
we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles
and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model
the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides
since the etched groove shape depends on the aspect ratio of the photoresist mask ridge
if we wish to fabricate larger gratings with this method
we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
基于电光调制的激光光谱整形技术
期刊论文
OAI收割
Chin. Opt. Lett., 2008, 卷号: 6, 期号: 11, 页码: 841, 844
王艳海
;
王江峰
;
姜有恩
;
鲍岩
;
李学春
;
林尊琪
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浏览/下载:1291/335
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提交时间:2009/09/18
啁啾脉冲放大
增益窄化
光谱整形
电光波导调制器
孔径耦合带状线
Chirped laser pulses
Chirped pulse amplification systems
Chirped pulses
Frequency intervals
Gain narrowing
Integrated waveguides
Optic modulations
Optical-
Phase errors
Pulse shapes
Pulse spectrums
Spectral shaping
Spectrum shaping
Strip lines
Time domains
Time intervals
Waveform generators
再生放大器宽带光谱整形的双折射片设计
期刊论文
OAI收割
Chin. Opt. Lett., 2007, 卷号: 5, 期号: 8, 页码: 493, 496
陆效明
;
李闯
;
冷雨欣
;
王乘
;
张春梅
;
梁晓燕
;
李儒新
;
徐至展
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浏览/下载:829/67
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提交时间:2009/09/18
啁啾脉冲放大
Birefringent plate (BP)
双折射片
Broadband spectral shaping
再生放大器
光谱整形
脉冲宽度
Spectral shaping of femtosecond pulses with a prism-waveguide coupler
期刊论文
OAI收割
j. opt. a-pure appl. opt., 2006, 卷号: 8, 期号: 5, 页码: 454, 457
Liu XM
;
Zhu PF
;
Cao ZQ
;
Deng XX
;
Shen QS
;
Chen JL
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浏览/下载:1382/203
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提交时间:2009/09/18
spectral shaping
femtosecond pulses
prism-waveguide coupler
飞秒光谱全息技术及飞秒整形技术的应用
期刊论文
OAI收割
激光与光电子学进展, 2005, 卷号: 42, 期号: 5, 页码: 24, 29
邹华
;
周常河
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浏览/下载:1194/139
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提交时间:2009/09/18
飞秒光谱
femtosecond pulse shaping
整形技术
spectral holography
全息技术
femtosecond chemistry
应用
飞秒脉冲
脉冲信号
化学领域
时空变换
窄线宽半导体激光阵列外腔光谱合束的研究
学位论文
OAI收割
作者:
于娜
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收藏
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浏览/下载:43/0
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提交时间:2018/12/26
半导体激光阵列
Diode laser array
光束整形
beam shaping
光谱合束
Spectral beam combining
外腔反馈
external cavity feedback
衍射光栅
diffraction gratings
半导体激光外腔反馈光谱合束的研究
学位论文
OAI收割
作者:
周权
  |  
收藏
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浏览/下载:17/0
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提交时间:2018/12/26
光谱合束
Spectral beam combining
半导体激光器阵列
Diode laser array
外腔反馈
External cavity feedback
光束整形
Beam shaping
衍射光栅
Diffraction gratings