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	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However the former has the disadvantage of weak intensity distribution controlling ability and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE light beam propagation distance and the structure of the beam shaping unit a method of determining the designing parameters is discussed. Using this method several illumination modes are realized and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last and it is proven to be feasible. 2010 SPIE.
	Optical system design with high resolution and large field of view for the remote sensor (EI CONFERENCE) 会议论文 OAI收割 Chang J.; Weng Z.-C.; Wang Y.-T.; Cheng D.-W.; Jiang H.-L. 收藏 \| 浏览/下载：29/0 \| 提交时间：2013/03/25 In this paper we are presenting a design method and its results for a space optical system with high resolution and wide field of view. This optical system can be used both in infrared and visible configurations. The designing of this system is based on an on-axis three-mirror anastigmatic (TMA) system. Here the on-axis concept allows wide field of view (FOV) enabling a diversity of designs available for the Multi-Object Spectrometer instruments optimized for low scattered and low emissive light. The available FOVs are upto 1 in both spectrum ranges whereas the available aperture range is F/15 - F/10. The final optical system is a three-mirror telescope with two on-axis and one off-axis segment and its resolution is 0.3m or even lower. The distinguished feature of this design is that it maintains diffraction-limited image at wide wavelengths. The technological developments in the field of computer generated shaping of large-sized optical surface details with diffraction-limited imagery have opened new avenues towards the designing techniques. Such techniques permit us to expand these technological opportunities to fabricate the aspherical off-axis mirrors for a complex configuration.
	基于电光调制的激光光谱整形技术期刊论文 OAI收割 Chin. Opt. Lett., 2008, 卷号: 6, 期号: 11, 页码: 841, 844 王艳海; 王江峰; 姜有恩; 鲍岩; 李学春; 林尊琪收藏 \| 浏览/下载：1291/335 \| 提交时间：2009/09/18 啁啾脉冲放大增益窄化光谱整形电光波导调制器孔径耦合带状线 Chirped laser pulses Chirped pulse amplification systems Chirped pulses Frequency intervals Gain narrowing Integrated waveguides Optic modulations Optical- Phase errors Pulse shapes Pulse spectrums Spectral shaping Spectrum shaping Strip lines Time domains Time intervals Waveform generators
	变栅距光栅实现啁啾脉冲光谱整形期刊论文 OAI收割光学学报, 2007, 卷号: 27, 期号: 2, 页码: 272, 274 郭爱林; 杨庆伟; 谢兴龙; 高奇; 薛志玲; 李美荣收藏 \| 浏览/下载：1253/279 \| 提交时间：2009/09/18 激光光学 laser optics 啁啾脉冲 chirped pulse 光谱整形 spectrum shaping 变栅距光栅 variable line-space gratings 严格耦合波分析 rigorous coupled-wave analysis 空间整形 spatial shaping