机构

• 金属研究所 [1]
• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [1]
• 期刊论文 [1]

发表日期

• 2015 [1]
• 2010 [1]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating 期刊论文  OAI收割 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2015, 卷号: 15, 期号: 9, 页码: 7357-7362 Lang, W. C.; Gao, B.; Du, H.; Xiao, J. Q.; Li, M. X.; Wang, X. H. 收藏  |  浏览/下载：26/0  |  提交时间：2016/04/21 Arc Ion Plating  Transverse Magnetic Field (TMF)  Pulsed Bias  Nitrogen Partial Pressure  Substrate Position  Macro-Particles Reduction   Design and fabrication of CGH for aspheric surface testing and its experimental comparison with null lens (EI CONFERENCE) 会议论文  OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者:  Zhao J.;  Zhang X.;  Zhang X.;  Zhang X.;  Li F. 收藏  |  浏览/下载：33/0  |  提交时间：2013/03/25 Computer-generated hologram (CGH) is an effective way to compensate wavefront in null test of aspheric surfaces and freeform surfaces. Our strategies of CGH design and fabrication for optical testing are presented  and an experiment demonstrating the compensation results of CGH and null lens is also reported. In order to design complex CGH  software was developed  with which we can design a CGH including three sections: main section for compensating wavefront in null test  alignment section for adjusting the relative position between CGH and interferometer  and fiducial section for projecting fiducial marks around the optics under test. The design result is represented in GDS II format file which could drive a laser-direct-writer- machine to fabricate a photomask. Then  a 1:1 replication process is applied to duplicate the patterns from photomask to a parallel optical substrate whose surface is error better than /60 rms. Finally  an off-axis aspheric surface was tested with CGH and null lens respectively. The test result with CGH (0.019rms) is almost the same as the result with null lens (0.020 rms). This experiment also demonstrated that fiducial marks projected by CGH can be used to guide the alignment of the optics and measurement of its off-axis distance. 2010 Copyright SPIE - The International Society for Optical Engineering.