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	The Impact of Ultraviolet Illumination on the Initial Atmospheric Corrosion of the Copper Covered by (NH4)(2)SO4 Thin Electrolyte Layer 期刊论文 OAI收割 INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE, 2015, 卷号: 10, 期号: 12, 页码: 10726-10737 作者: Cheng, Qing Li; Tao, Bin; Zhang, Wei Hua; Liu, Shuan; Hou, Baorong 收藏 \| 浏览/下载：24/0 \| 提交时间：2016/02/05 Copper Atmospheric corrosion Electrochemical impedance spectroscopy XRD Ultraviolet illumination
	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However the former has the disadvantage of weak intensity distribution controlling ability and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE light beam propagation distance and the structure of the beam shaping unit a method of determining the designing parameters is discussed. Using this method several illumination modes are realized and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last and it is proven to be feasible. 2010 SPIE.
	UV-VUV spectral irradiance responsivity calibration for space remote sensing spectroradiometer (EI CONFERENCE) 会议论文 OAI收割 Advanced Materials and Devices for Sensing and Imaging III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Yu H. 收藏 \| 浏览/下载：42/0 \| 提交时间：2013/03/25 In order to overcome the irradiance responsivity calibration troubles caused by the weak response of most spectral radiometers in ultraviolet band and poor ratio of signal to noise and to meet special calibration condition for some remote sensing spectroradiometers in space a spectral irradiance responsivity calibration unit based on parallel light illumination mode is established it is composed of a 150W deuterium lamp and a spherical mirror. The calibration unit gets the output standard value of spectral irradiance by irradiance transfer this way avoids the spectral reflectance measurement difficulty of the spherical mirror. A flight spectral radiometer model used for space remote sense was calibrated in range from 160nm to 300nm the calibration error of spectral irradiance responsivity is 4.7%. Some factors which contribute to calibration uncertainties are discussed.