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	The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification 期刊论文 OAI收割 Journal of Micromechanics and Microengineering, Journal of Micromechanics and Microengineering, 2021, 2021, 卷号: 31, 31, 期号: 11, 页码: 13, 13 作者: Li,Cun; Zhang,Quanwei; Zhao,Yulong; Tian,Chuan; Li,Bo \| 收藏 \| 浏览/下载：44/0 \| 提交时间：2021/11/16 resonant sensor resonant sensor quality factor quartz DETF structural damping air damping quality factor quartz DETF structural damping air damping
	The Stiffness and Damping Characteristics of a Dual-Chamber Air Spring Device Applied to Motion Suppression of Marine Structures 期刊论文 OAI收割 APPLIED SCIENCES-BASEL, 2016, 卷号: 6, 期号: 3 作者: Ceng XH(曾晓辉); Zhang L(张良); Yu Y(余杨); Shi M(史民); Zhou JF(周济福) 收藏 \| 浏览/下载：86/0 \| 提交时间：2016/04/21 orthogonal analysis dual-chamber air spring floating marine structure vibration suppression stiffness and damping
	Study of micro-actuator with electrostatic actuating (EI CONFERENCE) 会议论文 OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者: Liu C.-X.; Liu C.-X. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed which is actuated by electrostatic force. Based on the torsion dynamics theory the technique and relative formula are presented for analyzing the actuating voltage and the switching time on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10m length and width of the cantilever beam are 1900 and 1000m length and width of the balance beam are 100 and 1000m and distance of the upper and lower electrodes is 55m respectively. The actuating voltage is about 50 V and the switching time Toff and Ton are about 5 and 12 ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally an optical technique is described for the measurement of the actuating voltage and switching time of the device and the difference between the experimental results and theoretical datum is discussed.
	Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE) 会议论文 OAI收割 Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China 作者: Wang G.; Chen W. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10 m length and width of the cantilever beam are 1900 and 1000 m length and width of the balance beam are 100 and 1000 m shortest spacing between the upper and lower electrodes is 0.05 m and highness of the lower electrode is 55 m respectively. The actuating voltage is less than 10 V and the switching time of Ton and Toff are 1.30ms and 1.25ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.