机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2011 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Effect of deposition rate on the DUV/VUV reflectance of MgF2 protected aluminum mirrors with e-beam evaporation (EI CONFERENCE) 会议论文  OAI收割 7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China 作者:  Wang T.-T.;  Gao J.-S. 收藏  |  浏览/下载：29/0  |  提交时间：2013/03/25 Aluminum mirrors were freshly fabricated under optimum conditions protected with MgF2 at various deposition rates which evaporated by e-beam. All the samples were deposited on fine polished fused silica substrate. The reflectance results were measured by Mcpherson Vuvas2000 spectrometer in DUV/VUV spectral region from 150nm to 350nm. The highest reflectance is chosen to 210nm  and the point of 160nm is also very important for the project  so the results of two points are detailed presented. The highest average reflectance is about 86.76% with the MgF2 deposition rate at 1.2nm/s. The effects of aging on the reflectance of the MgF2 protected aluminum mirrors are discussed. 2011 SPIE.